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Dopant Profiling of Silicon Calibration Specimens by Off-Axis Electron Holography

  • D Cooper
  • R Truche
  • F Laugier
  • F Bertin
  • A Chabli
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 120)

Summary

Si calibration specimens have been grown for characterisation using off-axis electron holography. Holograms were acquired using an FEI Titan electron microscope in a specially designed room allowing long acquisition times to be used. We show a significant improvement in the signal-to-noise ratio in the phase images whilst using a low electron beam intensity to reduce the effects of specimen charging.

Keywords

Phase Image Dopant Profile Convergent Beam Electron Diffraction Phase Profile Specimen Charge 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Reference

  1. 1.
    Rau W D, Schwander P, Baumann, F H, Hoppner W and Ourmazd A 1999 App. Phys. Lett.82, 2614CrossRefGoogle Scholar
  2. 2.
    Cooper D, Twitchitt A, Somodi P K, Midgley P A, Dunin-Borkowski R E, Farrer I and Ritchie D A 2006 App. Phys. Lett.88, 063510CrossRefADSGoogle Scholar
  3. 3.
    Cooper D, Twitchitt A, Midgley P A and Dunin-Borkowski 2007 J. Appl. Phys.In press Google Scholar
  4. 4.
    Somodi P K 2005 Ph.D. Thesis University of CambridgeGoogle Scholar
  5. 5.
    Overwijk M H F, van der Heuvel and Bulle-Lieumwa C W T 1993 J. Vac. Sci. Technol.11, 2021CrossRefGoogle Scholar
  6. 6.
    Harscher A and Lichte H 1996 Ultramicroscopy64, 57CrossRefGoogle Scholar
  7. 7.
    Zalm P C 1995 Rep. Prog. Phys.58, 1321CrossRefADSGoogle Scholar
  8. 8.
    Cooper D, Truche R, Rouviere J L and Chabli A 2007 UltramicroscopySubmitted Google Scholar
  9. 9.
    Sasaki H, Yamamoto K, Hirayama T, Ootomo S, Matsuda T, Iwase F, Nakasaki R and Ishii H 2006 App. Phys. Lett.89, 244101CrossRefADSGoogle Scholar

Copyright information

© Springer Science+Business Media B.V. 2008

Authors and Affiliations

  • D Cooper
    • 1
  • R Truche
    • 1
  • F Laugier
    • 1
  • F Bertin
    • 1
  • A Chabli
    • 1
  1. 1.CEA LETI, MinatecGrenoble, Cedex 9France

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