Dopant Profiling of Silicon Calibration Specimens by Off-Axis Electron Holography
Si calibration specimens have been grown for characterisation using off-axis electron holography. Holograms were acquired using an FEI Titan electron microscope in a specially designed room allowing long acquisition times to be used. We show a significant improvement in the signal-to-noise ratio in the phase images whilst using a low electron beam intensity to reduce the effects of specimen charging.
KeywordsBoron Titan Milling Trench
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