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Microscopy of Semiconducting Materials 2007 pp 111–114Cite as

Investigation of the Local Ge Concentration in Si/SiGe Multi-QW Structures by CBED Analysis and FEM Calculations

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Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 120))

Summary

The local Ge concentration in Si/SiGe multiquantum well structures was investigated by CBED analysis. Series of bright field CBED patterns were taken across the quantum wells using the [340]-zone axis in STEM mode. The HOLZ lines in these patterns were fitted with the JEMS program [1] in order to deduce the local lattice parameters. With finite-element calculations taking the plastic relaxation of the thin TEM foil into account the Ge concentrations corresponding to these sets of lattice parameters were determined.

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References

  1. Electron Microscopy Software Java version (JEMS), P. Stadelmann, EFP Lausanne, Switzerland

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Author information

Authors and Affiliations

  1. Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, Villigen, CH-5232, Switzerland

    E Ruh

  2. Solid States Physics Laboratory, ETH Zurich, Zurich, CH-8093, Switzerland

    E Ruh

  3. Institute for Bio- and Nanosystems, Forschungszentrum Jülich, Jülich, D-52425, Germany

    G Mussler & D Grützmacher

  4. Electron Microscopy Centre ETH Zurich, EMEZ, Zurich, CH-8093, Switzerland

    E Müller

Authors
  1. E Ruh
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  2. G Mussler
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  3. E Müller
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  4. D Grützmacher
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Editor information

Editors and Affiliations

  1. Department of Electronic and Electrical Engineering, University of Sheffield, Mappin Street, Sheffield, S1 3JD, UK

    A. G. Cullis

  2. Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge, CB2 3QZ, UK

    P. A. Midgley

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© 2008 Springer Science+Business Media B.V.

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Ruh, E., Mussler, G., Müller, E., Grützmacher, D. (2008). Investigation of the Local Ge Concentration in Si/SiGe Multi-QW Structures by CBED Analysis and FEM Calculations. In: Cullis, A.G., Midgley, P.A. (eds) Microscopy of Semiconducting Materials 2007. Springer Proceedings in Physics, vol 120. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-8615-1_25

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