Heterogeneous Integration of Passive Components for the Realization of RF-System-in-Packages
Applications using rf radios operating at frequencies above 1 GHz are proliferating. The highest operating frequencies continue to increase and applications above 10 GHz and up to 77 GHz are already emerging. Systems become more complex and devices need to operate at several different frequency bands using different wireless standards. The rf-front end sections of these devices are characterized by a high diversity of components, in particular high precision passive components. In order to be produced cost-effectively, these elements need to be integrated along with the semiconductor devices. This paper describes the requirements for successful integration of rf-passive devices and proposes multilayer thin film technology as an effective rf-integration technology.
KeywordsPassive Component Multilayer Thin Film Process Tolerance Spiral Inductor High Frequency Characteristic
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