Microfabrication Processes

  • Robert W. Johnstone
  • M. Parameswaran


Before addressing the manufacturing technologies used in micromachining, the individual processing steps will be covered. The techniques described in this chapter provide the foundation upon which complete fabrication processes for micromachining1 are based.


Chemical Mechanical Polishing Wafer Surface Dopant Atom Ball Bond Mask Aligner 
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Copyright information

© Kluwer Academic Publishers 2004

Authors and Affiliations

  • Robert W. Johnstone
    • 1
  • M. Parameswaran
    • 1
  1. 1.Engineering ScienceSimon Fraser UniversityCanada

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