Microfabrication Processes

  • Robert W. Johnstone
  • M. Parameswaran

Abstract

Before addressing the manufacturing technologies used in micromachining, the individual processing steps will be covered. The techniques described in this chapter provide the foundation upon which complete fabrication processes for micromachining1 are based.

Keywords

Porosity Migration Quartz Furnace Dioxide 

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Copyright information

© Kluwer Academic Publishers 2004

Authors and Affiliations

  • Robert W. Johnstone
    • 1
  • M. Parameswaran
    • 1
  1. 1.Engineering ScienceSimon Fraser UniversityCanada

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