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Raised Structures

  • Robert W. Johnstone
  • M. Parameswaran

Abstract

Surface-micromachined devices are typically contained in a volume specified by the area of the chip and the height of the thin-films used during fabrication. Even a very small chip will be several millimetres on a side. However, the total height of the thin-films will typically be measured in microns. Thus, surface-micromachined devices are quite constrained in this one direction1. This small vertical range can be a disadvantage.

Keywords

Wafer Surface Microelectromechanical System Automate Assembly Manual Assembly Release Step 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Kluwer Academic Publishers 2004

Authors and Affiliations

  • Robert W. Johnstone
    • 1
  • M. Parameswaran
    • 1
  1. 1.Engineering ScienceSimon Fraser UniversityCanada

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