Abstract
An introduction of MEMS in general is made. Then the paper provides an overview of essential MEMS devices already elaborated for different problems of flow control in aeronautics. In the last part, attention is focused on solutions based on Micro-Magneto-Mechanical Systems (MMMS).
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Pernod, P. et al. (2008). MEMS for Flow Control: Technological Facilities and MMMS Alternatives. In: Morrison, J.F., Birch, D.M., Lavoie, P. (eds) IUTAM Symposium on Flow Control and MEMS. IUTAM Bookseries, vol 7. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-6858-4_2
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DOI: https://doi.org/10.1007/978-1-4020-6858-4_2
Publisher Name: Springer, Dordrecht
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Online ISBN: 978-1-4020-6858-4
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