In-Situ Electron Microscopy Testing of Nanostructures

Abstract

Over the past decade, there has been a major thrust to reduce the size of electronic and electromechanical systems to the nanometer scale by fabricating devices out of thin films, carbon nanotubes (CNTs) and nanowires (NWs). In these applications, a thorough understanding of material mechanical, electrical and thermal properties as well as device performance and reliability requires the development of novel experimental approaches. In this plenary lecture, two such experimental methodologies will be introduced and discussed. The first addresses the development of MEMS devices for in-situ electron microscopy mechanical testing of thin films and one dimensional (1-D) nanostructures [1, 2]. The second experimental methodology addresses the in-situ SEM testing of NEMS to assess device electro-mechanical performance (pull-in voltage, I-V curves, and time response) and reliability [3].