An axial flow cyclone to remove nanoparticles at low pressure conditions
In this study, the axial flow cyclone used in Tsai et al. (2004) was further tested for the collection efficiency of both solid (NaCl) and liquid (OA, oleic acid) nanoparticles. The results showed that the smallest cutoff aerodynamic diameters achieved for OA and NaCl nanoparticles were 21.7 nm (cyclone inlet pressure: 4.3 Torr, flow rate: 0.351 slpm) and 21.2 nm (5.4 Torr, 0.454 slpm), respectively. The collection efficiencies for NaCl and OA particles were close to each other for the aerodynamic diameter ranging from 25 to 180 nm indicating there was almost no solid particle bounce in the cyclone. The 3-D numerical simulation was conducted to calculate the flow field in the cyclone and the flow was found to be nearly paraboloid. Numerical simulation of the particle collection efficiency based on the paraboloid flow assumption showed that the collection efficiency was in good agreement with the experimental data with less than 15% of error. A semi-empirical equation for predicting the cutoff aerodynamic diameter at different inlet pressures and flow rates was also obtained. The semi-empirical equation is able to predict the cutoff aerodynamic diameter accurately within 9% of error. From the empirical cutoff aerodynamic diameter, a semi-empirical square root of the cutoff Stokes number, √St 50 * , was calculated and found to be a constant value of 0.241. This value is useful to the design of the cyclone operating in vacuum to remove nanoparticles.
Key wordsaxial flow cyclone nanoparticle control particle loading effect particle control equipment occupational health
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