Abstract
Films of zirconia-based solid electrolytes were prepared by the ionplasma sputtering method. Scanning and transmission electron microscopy methods were used to analyze their structure and processes of their formation. It was found that films of ZrO2 – Y2O3 and ZrO2 – Sc2O3 systems had a nanocrystalline structure. The zirconia-based films were characterized by a columnar structure. A model describing the formation of pores and submicropores during the growth of films of ZrO2 – Y2O3 and ZrO2 – Sc2O3 systems was proposed and discussed.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Leon I. Maissel and Reinhard Glang. Handbook of Thin Films Technology. V. 1. Moscow, Sov. Radio. 1977, 664 p.
Georgy Hass. Physics of Thin Films. V 1. Moscow, Mиp, 1967, 343 p.
Georgy Hass and Rudolf Tunn. Physics of Thin Films. V.4. Moscow, Mir, 1970, 440 p.
Palatnik L.S., Fuks M.Ya., Kosevich V.M. The Mechanism of Formation and the Substructure of Condensed Films. Moscow, Nauka, 1972, 320 p.
Chopra K.L. Electrical Phenomena in Thin Films. Moscow, Mir, 1972, 436 p.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2007 Springer
About this paper
Cite this paper
MALKOV, V., STREKALOVSKIY, V., MALKOV, A., PUCHIN, V., MALKOV, O., SHULGIN, B. (2007). STRUCTURE AND FORMATION OF FILMS OF ZIRCONIA-BASED SOLID ELECTROLYTE. In: Veziroglu, T.N., et al. Hydrogen Materials Science and Chemistry of Carbon Nanomaterials. NATO Security through Science Series A: Chemistry and Biology. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-5514-0_72
Download citation
DOI: https://doi.org/10.1007/978-1-4020-5514-0_72
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-5512-6
Online ISBN: 978-1-4020-5514-0
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)