Abstract
Materials under ion irradiation undergo significant atomic rearrangement. The most obvious example of this phenomenon is the atomic intermixing and alloying that can occur at the interface separating two different materials during ion irradiation. This process is known as ion beam mixing. An early observation of the ion mixing phenomenon was made following the irradiation of a Si substrate coated with a thin Pd film. A reaction between Pd and Si was observed when the irradiating Ar ions had sufficient energy to penetrate through the Pd/Si interface [1]. This process is schematically displayed in Fig. 1 for a layer M on a substrate S for successively higher irradiation doses.
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Nastasi, M., Mayer, J.W. (2007). ION BEAM MIXING. In: Sickafus, K.E., Kotomin, E.A., Uberuaga, B.P. (eds) Radiation Effects in Solids. NATO Science Series, vol 235. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-5295-8_13
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DOI: https://doi.org/10.1007/978-1-4020-5295-8_13
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