We may define three main categories of crystal growth techniques: growth from solid, vapour, and melt. These three main categories of crystal growth methods need careful control of the phase change. We may introduce a subcategory, growth from the solution, which is strictly already included in the above definitions, and which represents crystal growth processes of solute from an impure melt.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Szmyd JS, Suzuki K (2000) Introduction to crystal growth processes from the melt. In: SzmydJS, Suzuki K (eds) Modelling of Transport Phenomena in Crys-tal Growth. WITPress, Southampton, pp 1-18
Czochralski J (1917) Ein neues Verfahren zur Messung der Kristallisation-segeschwindigkeit der Metalle. Z Phys Chem 92:219-221
Teal GH, Little JB (1950) The growth of germanium single crystals. Phys Rev 78:647
Dash WC (1959) Growth of silicon crystals free from dislocations. J Appl Phys 30:459-474
Prasad V, Zhang H (1997) Transport phenomena in Czochralski crystal growth processes. Advances in Heat Transfer, Vol 30, Academic Press, New York, pp 313-435
Szmyd JS, Suzuki K (2000) Transport phenomena during growth of supercon-ducting materials by Czochralski method. In: SzmydJS, Suzuki K (eds) Mod-elling of Transport Phenomena in Crystal Growth. WITPress, Southampton, pp 279-321
Brown RA (1988) Theory of transport processes in single crystal growth from the melt. AIChE J 34:881-911
Shimura F (1989) Semiconductor Silicon Crystal Technology. Academic Press, Orlando
Hurle DTJ (1993) Crystal Pulling from the Melt. Springer-Verlag, Berlin
Hurle DTJ, Cockayne B (1994) Czochralski growth. In: HurleDTJ (ed) Hand-book of Crystal Growth. Elsevier Science BV, Amsterdam 2a:99-211
Dupret F, van den Bogaert N (1994) Modelling Bridgman and Czochralski growth. In: HurleDTJ (ed) Handbook of Crystal Growth Vol 2b. Elsevier Sci-ence BV, Amsterdam, pp 875-1010
Theuerer HC (1952) US patent No 3 060 123
Keck PH, Golay MJE (1953) Crystallization of silicon from a floating liquid zone. Phys Rev 89:1297
Pfann WG (1966) Zone Melting. Wiley, New York
BohmJ, Lüdge A, Schröder W (1994) Crystal growth by floating zone melting. In: HurleDTJ (ed) Handbook of Crystal Growth Vol 2a. Elsevier Science BV, Amsterdam, pp 214-257
Kapitza P (1928) The study of the specific resistance of bismuth crystals and its change in strong magnetic fields and some allied problems. Proc Roy Soc A 119:358-443
Pfann WG (1952) Principle of zone-melting. Trans AIME 194:747-753
Pfann WG (1962) Zone melting. Science 135:1101-1109
Ozoe H (2000) Effect of a magnetic field in Czochralski silicon crystal growth. In: SzmydJS, Suzuki K (eds) Modelling of Transport Phenomena in Crystal Growth. WITPress, Southampton, pp 201-237
Ozoe H, Okada K (1989) The effect of the direction of the external magnetic field on the three-dimensional natural convection in a cubical enclosure. Int J Heat Mass Transfer 32:1939-1954
Okada K, Ozoe H (1992) Experimental heat transfer rates of natural convection of molten gallium suppressed under an external magnetic field in either the x, y, or z direction. J Heat Transfer 114:107-114
Garandet JP, AlboussièreT, Moreau R (1992) Buoyancy driven convection in a rectangular enclosure with a transverse magnetic field. Int J Heat Mass Transfer 35(4):741-748
AlboussièreT, Garandet JP, Moreau R (1996) Asymptotic analysis and sym-metry in MHD convection. Phys Fluids 8(8):2215-2226
BühlerL (1998) Laminar buoyant magnetohydrodynamic flow in vertical rec-tangular ducts. Phys Fluids 10(1):223-235
Barz RU, Gerbeth G, Wunderwald U, Buhrg E, Gelfgat YuM (1997) Modelling of the isothermal melt flow due to rotating magnetic fields in crystal growth. J Crystal Growth 180:410-421
Ben Hadid H, Vaux S, Kaddeche S (2001) Three-dimensional flow transitions under a rotating magnetic field. J Crystal Growth 230:57-62
Walker JS, Martin Witkowski L, Houchens BC (2003) Effects of a rotating magnetic field on the thermocapillary instability in the floating zone process. J Crystal Growth 252:413-423
Tagawa T, Ozoe H (1998) The natural convection of liquid metal in a cubical enclosure with various electro-conductivities of the wall under the magnetic field. Int J Heat Mass Transfer 41:1917-1928
Molokov S, Bühler L (2003) Three-dimensional buoyant convection in a rec-tangular box with thin conducting walls in a strong horizontal magnetic field. Forschungszentrum Karlsruhe Report FZKA 6817
Shercliff JA (1979) Thermoelectric magnetohydrodynamics. J Fluid Mech 91(2):231-251
Moreau R, Lasker O, Tanaka M (1996) Thermoelectric and magnetohydrody-namic effects on solidifying alloys. Magnetohydrodynamics 32(2):173-177
Kaneda M, Tagawa T, Ozoe H (2002) Natural convection of liquid metal in a cube with Seebeck effect under a magnetic field. Int J Transport Phenom 4(3):181-191
Akamatsu M, Higano M, Ozoe H (2001) Elliptic temperature contours under a transverse magnetic field computed for a Czochralski melt. Int J Heat and Mass Transfer 44 3253-3264
Maekawa T, Tanasawa I (1988) Natural convection driven by buoyancy and surface tension forces under external magnetic filed. Adv Space Res 8(12): 215-218
Chandrasekhar S (1952) XLVI. On the inhibition of convection by a magnetic field. Phil Mag 7 43:501-532
Nakagawa Y (1955) An experiment on the inhibition of thermal convection by a magnetic field. Nature 175:417-419
Chandrasekhar S (1961) Hydrodynamic and Hydromagnetic Stability. Oxford University Press, Oxford
Chedzey HA, Hurle DTJ (1966) Avoidance of growth-striae in semiconductor and metal crystals grown by zone melting techniques. Nature 210:933
Utech HP, Flemings MC (1966) Elimination of solute banding in indium anti-monide crystals by growth in a magnetic field. J Appl Phys 37(5):2021-2024
Witt AF, Herman CJ, Gatos HC (1970) Czochralski-type crystal growth in transverse magnetic fields. J Mater Sci 5:822-824
Hoshi K, Suzuki T, Okubo Y, Isawa N (1980) Cz silicon crystal grown in trans-verse magnetic fields. Electrochem Soc Ext Abstr, St. Louis, 324:811-813
Hoshi K, Isawa N, Suzuki T (1984) Growth of silicon monocrystals in a magnetic field. Oyobutsuri (Applied Physics, in Japanese) 53(1):38-41
Suzuki T, Isawa N, Okubo Y, Hoshi K (1981) Cz silicon crystals grown in a transverse magnetic field. Semiconductor Silicon, Electrochemical Society, Pennington, pp 90-100
Kobayashi S (1986) Effects of an external magnetic field on solute distribution in Czochralski grown crystals-A theoretical analysis. J Crystal Growth 75:301-308
Williams MG, Walker JS, Langlois WE (1990) Melt motion in a Czochralski puller with a weak transverse magnetic field. J Crystal Growth 100:233-253
Ozoe H, Iwamoto M (1994) Combined effects of crucible rotation and horizontal magnetic field on dopant concentration in a Czochralski melt. J Crystal Growth 142:236-244
Ozoe H, Toh K (1998) A technique to circumvent a singularity at a radial center with application for a three-dimensional cylindrical system. Numer Heat Transf B 33:355-365
Mihelcic M, Wingerath K, Pirron Chr (1984) Three-dimensional simulations of the Czochralski bulk flow. J Crystal Growth 69:473-488
Kajigaya T, Kimura T, Kadota Y (1991) Effect of the magnetic flux direction on LEC GaAs growth under magnetic field. J Crystal Growth 112:123-128
Krauze A, Muiznieks A, Mühlbauer A, Wetzel Th, Tomzig E, Gorbunov L, Pedchenko A, Virbulis J (2004) Numerical 3D modeling of turbulent melt flow in a large CZ system with horizontal DC magnetic field. II. Comparison with measurements. J Crystal Growth 265:14-27
Hoshikawa K (1982) Czochralski silicon crystal growth in the vertical magnetic field. Japanese J Appl Phys 21(9):L545-L547
Langlois WE, Lee K-J (1983) Czochralski crystal growth in an axial magnetic field: Effects of joule heating. J Crystal Growth 62:481-486
Hurle DTJ, Series RW (1985) Effective distribution coefficient in magnetic Czochralski growth. J Crystal Growth 73:1-9
Organ AE (1985) Flow patterns in a magnetic Czochralski crystal growth sys-tem. J Crystal Growth 73:571-582
Hjellming LN, Walker JS (1986) Melt motion in a Czochralski crystal puller with an axial magnetic field: isothermal motion. J Fluid Mech 164:237-273
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 2007 Springer
About this chapter
Cite this chapter
Ozoe, H., Szmyd, J.S., Tagawa, T. (2007). Magnetic Fields in Semiconductor Crystal Growth. In: Magnetohydrodynamics. Fluid Mechanics And Its Applications, vol 80. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-4833-3_23
Download citation
DOI: https://doi.org/10.1007/978-1-4020-4833-3_23
Publisher Name: Springer, Dordrecht
Print ISBN: 978-1-4020-4832-6
Online ISBN: 978-1-4020-4833-3
eBook Packages: EngineeringEngineering (R0)