Texture Evolution During Thin Film Deposition

  • Hanchen Huang


The modeling of materials processing intrinsically spans multiple scales, in terms of both space and time. The modeling of thin film deposition, together with the accompanying texture evolution, spans 15 orders of magnitude in time, from fundamental atomic vibration period of 10−13 s to deposition duration of 102 s. This section describes challenging issues, critically presents existing approaches, and offers an outlook of future developments in the modeling of thin film texture evolution.


Texture Evolution Molecular Dynamic Method Continuum Approach Thin Film Deposition Amorphous Substrate 
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Copyright information

© Springer 2005

Authors and Affiliations

  • Hanchen Huang
    • 1
  1. 1.Department of Mechanical, Aerospace and Nuclear EngineeringRensselaer Polytechnic InstituteTroyUSA

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