Advertisement

Micro-Hall Magnetic Sensors: Physics, Technologies and Applications

  • Radivoje S. Popovic
  • Giovanni Boero
  • Pierre-Andre Besse
Conference paper
Part of the NATO Science Series book series (NAII, volume 181)

This chapter describes the Hall plates with the planar dimensions from micro-meter to deep sub-micrometer range. In the theoretical part, the physical phenomena in such micro-devices are described. Scaling down the dimensions of a Hall plate, the prevailing mechanism of electron transport changes. In macroscopic devices stationary transport takes place. Depending on the device size and applied voltage, the drift velocity of carriers may be linearly dependent on the voltage or saturated. Scaling down further, the device enters the non-stationary transport range, where velocity overshoot and ballistic transport occur. In each regime magnetic sensitivity and noise of the device are estimated. In the experimental part, a review of the published results on the technologies, performance, and applications of micro-Hall devices is given. In summary, scaling down a Hall sensor brings about a degradation of its basic characteristics. On the other hand, micro-Hall devices open the way to applications where high spatial resolution is necessary, like in scanning Hall probe microscopy.

Keywords: Magnetic sensors, micro-Hall, scaling down, sensitivity, noise, resolution.

Keywords

Drift Velocity Magnetic Force Microscopy Hall Sensor Ballistic Transport Smart Sensor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Copyright information

© Springer 2004

Authors and Affiliations

  • Radivoje S. Popovic
    • 1
  • Giovanni Boero
    • 2
  • Pierre-Andre Besse
    • 2
  1. 1.Swiss Federal Institute of Technology LausanneEPFL – DMT – IMSSwitzerland
  2. 2.EPFL-Swiss Federal Institute of Technology LausanneLausanne

Personalised recommendations