Abstract
Crack tip plasticity in silicon crystals has been studied by both high voltage electron microscopy (HVEM) and atomic force microscopy (AFM). Cracks were introduced into silicon wafers at mom temperature by Vickers indentation method. Specimens indented were annealed at temperatures higher than 773K to activate dislocation sources around a crack tip under the residual stress due to the indentation. In the present study, two types of plastic zones were examined: the 45° -shear-type in |001} wafers and hinge-type in |011} wafers. In AFM observations, very fine and sharp slip bands were found around crack tips in both types of plastic zones, where the step heights in the slip bands we around a few nanometers. In HVEM study, characteristic dislocation configurations have been observed in each type of plastic zone. Contrast simulations for the dislocations revealed not only their slip systems but also the signs of their Burgers vectors. The dislocation structures characterized by HVEM correspond well with the slip bands found by AFM. Those dislocations were shielding-type, which contributes to the increase of facture toughness to cause the sharp brittle-to-ductile transition of silicon crystals.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
C. St. John, Phil. Mag., 32(1975), 1193–1212.
M. Brede and P. Hsaseri, Actta Metall., 36(1988) 2003–2018.
A. Geotge and G Michot, Mater Sci. Engng., A164(1993) 118–134.
P.B. Hirsch and S.G Roberts, Phil.Trans. RSoc, Lond. A, 355(1997) 1991 2002.
K. Higashida, N. Narita, M. Tanaka, T. Morikawa, Y. Mum and R Onodera, Phi. Mag. A, 82(2002), 3263–3273
M. Tanaka, K. Hiigashida, T. Kishikawa and T. Morikawa, Matter. Trans., 43(2002) 2169–2172
P.B. Hlinch, A Howie, RB Nicholson, D.W. Pashley and M.J. Whelan: Electron Microscopy ofThin Crystals, (London: Buttervvorths, 1965)
A.K. Head, P. Humble, L.M. Clarebrough, A.J. Morton and C.T. Forwood: Computed Electron Micrographs and Defect Identification, (Amsterdam: North Holland, 1973)
J.P. Hirth and J. Lothe: Theory ofDislacations, (New York: McGraw-Hil,1968) pp19–22.
G. T Hahn and A.R. Rosenfield, Acta. Meta1l,13(1965), 293–306
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2004 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Higashida, K., Tanaka, M. (2004). HVEM/AFM Studies on Crack Tip Plasticity in Si Crystals. In: Kitagawa, H., Shibutani, Y. (eds) IUTAM Symposium on Mesoscopic Dynamics of Fracture Process and Materials Strength. Solid Mechanics and its Applications, vol 115. Springer, Dordrecht. https://doi.org/10.1007/978-1-4020-2111-4_15
Download citation
DOI: https://doi.org/10.1007/978-1-4020-2111-4_15
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-6576-6
Online ISBN: 978-1-4020-2111-4
eBook Packages: Springer Book Archive