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Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections pp 131–145Cite as

Finite Element Method for Dielectric Reliability

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Part of the book series: Springer Series in Reliability Engineering ((RELIABILITY))

Abstract

The effective dielectric constant (K eff ) is a concept to characterize the integrated working permittivity of a structure consisting of various dielectrics of different dielectric constants.

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Author information

Authors and Affiliations

  1. School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue 50, Singapore, 639798, Singapore

    Cher Ming Tan & Yuejin Hou

  2. Technology Research & Development, Semiconductor Manufacturing International (Shanghai) Corp., 18 Zhangjiang Road, Pudong New Area, 201203, Shanghai, People’s Republic of China

    Zhenghao Gan

  3. Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, 638075, Singapore, Singapore

    Wei Li

  4. #10-226 BLK156, Hougang Street 11, 530156, Singapore, Singapore

    Yuejin Hou

Authors
  1. Cher Ming Tan
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  2. Zhenghao Gan
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  3. Wei Li
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  4. Yuejin Hou
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Corresponding author

Correspondence to Cher Ming Tan .

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© 2011 Springer-Verlag London Limited

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Tan, C.M., Gan, Z., Li, W., Hou, Y. (2011). Finite Element Method for Dielectric Reliability. In: Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections. Springer Series in Reliability Engineering. Springer, London. https://doi.org/10.1007/978-0-85729-310-7_6

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  • DOI: https://doi.org/10.1007/978-0-85729-310-7_6

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  • Publisher Name: Springer, London

  • Print ISBN: 978-0-85729-309-1

  • Online ISBN: 978-0-85729-310-7

  • eBook Packages: EngineeringEngineering (R0)

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