Finite Element Method for Electromigration Study

  • Cher Ming Tan
  • Zhenghao Gan
  • Wei Li
  • Yuejin Hou
Part of the Springer Series in Reliability Engineering book series (RELIABILITY)


In Chap. 3, we introduce the basic concept and the general theory of finite element method (FEM) for electrical, thermal, mechanical, and coupled-field multi-physics analysis. EM is a complicated physical and material phenomenon that involves the analysis of electro-thermo-mechanical-coupled field analysis and governed by various partial differential equations. FEM is able to solve the partial differential equation and handle complex geometries (and boundaries) with relative ease. Therefore, several EM studies employ the FEM for more complete investigation on different interconnect structures. In this chapter, we will provide an overview on the application of FEM for EM study.


Hydrostatic Stress Void Growth Void Nucleation Metal Line Simulation Methodology 
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Copyright information

© Springer-Verlag London Limited  2011

Authors and Affiliations

  • Cher Ming Tan
    • 1
  • Zhenghao Gan
    • 2
  • Wei Li
    • 3
  • Yuejin Hou
    • 1
    • 4
  1. 1.School of Electrical & Electronic EngineeringNanyang Technological UniversitySingaporeSingapore
  2. 2.Technology Research & DevelopmentSemiconductor Manufacturing International (Shanghai) Corp.ShanghaiPeople’s Republic of China
  3. 3.Singapore Institute of Manufacturing TechnologySingaporeSingapore
  4. 4.SingaporeSingapore

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