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Control Using Kinetic Monte Carle Models

  • Panagiotis D. Christofides
  • Antonios Amaou
  • Yiming Lou
  • Amit Varsheny
Chapter
Part of the Control Engineering book series (CONTRENGIN)

Keywords

Surface Roughness Substrate Temperature Kinetic Monte Carlo Simulator Kinetic Monte Carlo Model Interaction Compensation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Birkhäuser Boston 2009

Authors and Affiliations

  • Panagiotis D. Christofides
    • 1
  • Antonios Amaou
    • 2
  • Yiming Lou
    • 3
  • Amit Varsheny
    • 4
  1. 1.University of CaliforniaLos AngelesUSA
  2. 2.Pennyivania State University, University ParkUSA
  3. 3.United Technologies CorporationPomonaUSA
  4. 4.WestminsterUSA

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