Thin Film Metrology - X-ray Methods

  • Boris YokhinEmail author


X-ray fluorescence method is based on producing vacancies in the inner atomic shells with the help of external X-ray source. These vacancies then de-excite and produce the characteristic X-rays of interest. The energy of the characteristic radiation indicates the atomic number, and intensity of this radiation allows to measure concentration or thickness of the film.


Pore Size Distribution Critical Angle Reflectivity Curve Positronium Annihilation Lifetime Spectrometry SiGe Film 
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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Jordan Valley SemiconductorMigdal HaemekIsrael

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