Abstract
X-ray fluorescence method is based on producing vacancies in the inner atomic shells with the help of external X-ray source. These vacancies then de-excite and produce the characteristic X-rays of interest. The energy of the characteristic radiation indicates the atomic number, and intensity of this radiation allows to measure concentration or thickness of the film.
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Yokhin, B. (2009). Thin Film Metrology - X-ray Methods. In: Shacham-Diamand, Y., Osaka , T., Datta, M., Ohba, T. (eds) Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications. Springer, New York, NY. https://doi.org/10.1007/978-0-387-95868-2_33
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DOI: https://doi.org/10.1007/978-0-387-95868-2_33
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