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Tools for Monitoring and Control of Bath Components

  • T. Ritzdorf
Chapter

Abstract

Maintaining constant chemical constituent concentrations in electrolytes is critical to ensure consistent process results in most deposition processes. In order to maintain consistent bath concentrations, it is important to be able to monitor the concentration of each constituent and to react to incorrect concentrations. The most efficient way to eliminate variation due to human factors and ensure consistent control is to automate the chemical management process [1].

Keywords

Electrochemical Activity Rotate Disk Electrode Cyclic Voltammetric Constituent Concentration Replenishment Rate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Semitool Inc.KalispellUSA

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