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Modeling Superconformal Electrodeposition Using an Open Source PDE Solver

  • D. Wheeler
  • J.E. Guyer
Chapter

Abstract

A critical aspect in the manufacturing of semiconductor devices is the filling of trenches and vias using metal electrodeposition. This filling process has been characterized extensively with semi-empirical mathematical and computational models, although much work is still required in order to employ less empirical models. However, these models have not been used in a predictive capacity in industry due to the time frame required for code development and experimental design and lack of available modeling software. To overcome these issues, an open source tool called FiPy [1] was developed for solving PDEs that commonly occur in materials science problems. It seeks to address the issues of coding practice and open source development by employing modern coding techniques and providing a flexible coding framework to rapidly pose, prototype, and share models of superfill and general deposition processes.

Keywords

Interface Velocity Phase Field Method Surface Affinity Extension Velocity Eulerian Framework 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Materials Science and Engineering LaboratoryNational Institute of Standards and TechnologyGaithersburgUSA

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