Challenges in ULSI Interconnects - Introduction to the Book

  • Y. Shacham-DiamandEmail author


Ultra large-scale integration (ULSI) technology is one of the most dominant and important technologies of the 21st century. It is the base for the global electronics system industry.


Chemical Mechanical Polishing Parasitic Capacitance Dynamic Random Access Memory Barrier Layer Thickness Actual Transition Rate 
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Copyright information

© Springer-Verlag New York 2009

Authors and Affiliations

  1. 1.School of EE, Tel Aviv UniversityTel AvivIsrael

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