Abstract
Microstereolithography is a technology that is based on the same manufacturing principle as stereolithography. Three-dimensional (3D) objects are built by the superimposition of many layers, each being produced by a light-induced space-resolved photopolymerization of a liquid resin. As the resolution of microstereolithography is far better than other rapid prototyping techniques, this technique creates interest in both the rapid prototyping domain, where it can be used to produce high-resolution prototypes, but also in the microengineering field, as it is clearly the microfabrication process that can produce small objects with the most complicated shapes and intricate details.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Hull, C.W., Apparatus for production of three dimensional objects by stereolithography. 1986: US Patent.
André, J.C., A. Le Méhauté, and O. De Witte, Dispositif pour réaliser un modèle de pièce industrielle. 1984: French Patent.
Zissi, S., et al., Stereolithography and Microtechniques. Microsystem Technologies, 1996. 2(2): p. 97–102.
Bertsch, A., J.Y. Jézéquel, and J.C. André, Study of the spatial resolution of a new 3D microfabrication process: the microstereophotolithography using a dynamic mask-generator technique. Journal of Photochemistry and Photobiology. A, Chemistry, 1997. 107: p. 275–281.
Yamaguchi, K. and T. Nakamoto. Consideration on the accuracy of fabricating microstructures using UV laser induced polymerization. In the 6th International Symposium on Micro Machine and Human Science (MHS’94). 1994.
Yamaguchi, K. and T. Nakamoto. Consideration on the optimum conditions to produce micromechanical parts by photo polymerization using direct focused beam writing. In 6th International Symposium on Micro Machine and Human Science (MHS’95). 1995. Piscataway, NJ, USA.
Nakamoto, T. and K. Yamaguchi. Consideration on the producing of high aspect ratio micro parts using UV sensitive photopolymer. In the 7th International Symposium on Micro Machine and Human Science (MHS’96). 1996.
Nakamoto, T., et al., Manufacturing of three-dimensional micro-parts by UV laser induced polymerization. Journal of Micromechanics and Microengineering, 1996. 6(2): p. 240–253.
Bertsch, A., et al., Rapid prototyping of small size objects. Rapid Prototyping Journal, 2000. 6(4): p. 259–266.
Tönshoff, H.K., et al. Qualification of different standard photo resins and new laser sources for micro-stereolithography. In 3rd micro materials conference MICROMAT2000. 2000. Berlin, Germany.
Bernhard, P., Proform devises method for adding a second small spot laser to its SLA 250/40. Rapid prototyping report, 1997. Dec. 1997.
Inverson, N.J., Why not use stereolithography as a manufacturing process? Rapid prototyping report, 1998. Mars 1998.
Takagi, T. and N. Nakajima. Photoforming applied to fine machining. In 4th International Symposium on Micro Machine and Human Science (MHS’93). 1993.
Ikuta, K. and K. Hirowatari. Real three dimensional micro fabrication using stereo lithography and metal molding. In 6th IEEE Workshop on Micro Electro Mechanical Systems (MEMS’93). 1993.
Takagi, T. and N. Nakajima. Architecture combination by micro photoforming process. In 7th IEEE Workshop on Micro Electro Mechanical Systems (MEMS’94). 1994. Oiso, Japan.
Takagi, T. and N. Nakajima, Photoforming applied to fine forming. JSME International Journal – Series C, 1995. 38(4): p. 811–817.
Ikuta, K., K. Hirowatari, and T. Ogota. Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography. In the IEEE Micro Electro Mechanical Systems Workshop (MEMS’94). 1994. Oiso, Japan.
Kobayashi, K. and K. Ikuta. Development of free surface microstereolithography with ultra high resolution to fabricate hybrid 3-D microdevices. In IEEE International symposium on Micro-Nano Mechatronics and Human Schience. 2005.
Zissi, S., et al. Limites de la stéréolithographie pour des applications microtechniques. In 3e Assises Européennes du Prototypage Rapide. 1994. Paris, France.
Zhang, X., X.N. Jiang, and C. Sun, Micro-stereolithography for MEMS. Micro Electro Mechanical Systems (MEMS) ASME, 1998. 66: p. 3–9.
Kobayashi, K. and K. Ikuta. Advanced free-surface microstereolithography with 10-micrometer resolution for hybrid microstructures. In IEEE/ASME International Conference on Advanced Intelligent Mechantronics. 2007.
Ikuta, K., et al. Development of mass productive micro stereo lithography. In 8th IEEE Workshop on Micro Electro Mechanical Systems (MEMS’96). 1996. Piscataway, NJ, USA.
Bertsch, A., et al. Nouveau procédé de microstéréolithographie utilisant des filtrages dynamiques. In 4èmes assises européennes du prototypage rapide. 1995. Paris, France: Remark S.A. Ed., Paris.
Bertsch, A., Microstéréophotolithographie par masquage dynamique. 1996, Ph. D. Thesis in Process Engineering, INPL-ENSIC. p. 168.
Bertsch, A., et al. Manufacture of multilayers microparts by microstereophotolithography. In 3rd France-Japan Congress and 1st Europe-Asia Congress on Mechatronics. 1996. Besançon, France.
Bertsch, A., et al., Microstereophotolithography using a liquid crystal display as dynamic mask-generator. Microsystem Technologies, 1997. 3(2): p. 42–47.
Loubère, V., S. Monneret, and S. Corbel. Microstereolithography using a mask-generator display. In the 4th Japan-France Congress and 2nd Asia-Europe Congress on Mechatronics. 1998. Kitakyushu, Japan.
Monneret, S., V. Loubère, and S. Corbel. Microstereolithography using a dynamic mask generator and a non-coherent visible light source. In SPIE Symposium on Design, Test and microfabrication of MEMs/MOEMs. 1999. Paris, France.
Chatwin, C.R., et al., UV microstereolithography system that uses spatial light modulator technology. Applied Optics, 1998. 37(32): p. 7514–7522.
Farsari, M., et al., A novel high-accuracy microstereolithography method employing an adaptive electro-optic mask. Journal of Materials Processing Technology, 2000. 107: p. 167–172.
Farsari, M., et al., Microfabrication by use of a spatial light modulator in the ultraviolet: experimental results. Optics Letters, 1999. 24(8): p. 549–550.
Farsari, M., et al. Holographic Measurements of Photopolymers for Microstereolithography Application. In Lasers and Electro-Optics Europe (1998 CLEO/Europe). 1998.
Farsari, M., et al., Four wave mixing studies of UV curable resins for microstereolithography. Journal of Photochemistry and Photobiology. A, Chemistry, 1998. 115: p. 81–87.
Chatwin, C.R., et al., Characterization of epoxy resins for microstereolithographic rapid prototyping. The International Journal, Advanced Manufacturing Technology, 1999. 15: p. 281–286.
Hornbeck, L.J. Digital Light Processing (TM) for high-brightness high-resolution applications. In Electronic Imaging (EI’97) – Projection displays III. 1997. San Jose, California, USA.
Nelson, W.E. and R.L. Bhuva. Digital micromirror device imaging bar for hard copy. In the SPIE color hard copy and graphics arts IV. 1997. San Jose, California, USA.
Bertsch, A., H. Lorenz, and P. Renaud. Combining microstereolithography and thick resist UV lithography for 3D microfabrication. In 11th IEEE Workshop on Micro Electro Mechanical Systems (MEMS’98). 1998. Heidelberg, Germany.
Beluze, L., A. Bertsch, and P. Renaud. Microstereolithography: a new process to build complex 3D objects. In SPIE Symposium on Design, Test and microfabrication of MEMs/MOEMs. 1999. Paris, France.
Bertsch, A., et al., Microstereolithography: a review. Materials Research Society Symposia Proceedings, 2003. 758: p. LL1.1.1–LL1.1.12.
Choi, J.W., et al., Fabrication of 3-dimensional microstructures using dynamic image projection. Key Engineering Materials, 2007. 339: p. 473–478.
Anonymous, Projection microstereolithography creates 3-D microstructures. Laser Focus World, 2000. 36(12): p. 11.
Sun, H.-B. and S. Kawata, Two-photon photopolymerization and 3D lithographic microfabrication. 2004: Springer-Verlag. 268.
Maruo, S. and S. Kawata, Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication. Journal of Microelectromechanical Systems, 1998. 7(4): p. 411–415.
Maruo, S., O. Nakamura, and S. Kawata. Three dimensional microfabrication with two-photon absorbed photopolymerization. In SPIE – Optics for Science and New Technology. 1996.
Maruo, S., O. Nakamura, and S. Kawata, Three-dimensional microfabrication with two-photon-absorbed photopolymerization. Optics Letters, 1997. 22(2): p. 132–134.
Maruo, S. and K. Ikuta. Movable microstructures made by two -photon three dimensional microfabrication. In International symposium on micromechatronics and human science (MHS’99). 1999.
Kawata, S. Three-dimensional micro-fabrication with two-photon and single-photon polymerization. In 4th Pacific Rim Conference on Lasers and Electro-Optics, 2001 (CLEO/Pacific Rim 2001). 2001.
Kawata, S., et al., Finer features for functional microdevices. Nature, 2001. 412: p. 697–698.
Tanaka, T. and S. Kawata. Three-dimensional fabrication and observation of micro-structures using two-photon absorption and fluorescence. In Micro and Nano-photonic materials and devices conference, SPIE. 2000.
Tanaka, T. and S. Kawata. Three-dimensional microfabrication by two-photon initiated photopolymerization. In Conference on Lasers and Electro-Optics (CLEO ‘01). 2001.
Galajda, P. and O. Pál, Complex micromachines produced and driven by light. Applied Physics Letters, 2001. 78(2): p. 249–251.
Miwa, M., et al., Femtosecond two-photon stereo-lithography. Applied Physics A, 2001. 73: p. 561–566.
Teh, W.H., et al., Effect of low numerical aperture femtosecond two-photon absorption on (SU-8) resist for ultrahigh aspect ratio microstereolithography. Journal of Applied Physics, 2005. 97: p. 054907-1–054907-11.
Sun, H.-B., M. Maeda, and K. Takada, Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization. Applied Physics Letters, 2003. 83(5): p. 819–821.
Cumpston, B.H., et al., Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication. Nature, 1999. 398: p. 51–54.
Yu, T., et al., Chemically amplified positive resists for two photon three-dimensional microfabrication. Advanced Materials, 2003. 15(6): p. 517–521.
Ikuta, K., S. Maruo, and S. Kojima. New micro stereo lithography for freely movable 3D micro structure – Super IH Process with submicron resolution. In 11th IEEE Workshop on Micro Electro Mechanical Systems (MEMS’98). 1998. Heidelberg, Germany.
Maruo, S. and K. Ikuta, Three dimensional microfabrication by use of single photon absorbed polymerization. Applied Physics Letters, 2000. 76(19): p. 2656–2658.
Maruo, S. and K. Ikuta, Submicron stereolithography for the production of freely movable mechanisms by using single-photon polymerization. Sensors and Actuators: A, 2002. 100: p. 70–76.
Varadan, V.K., X. Jiang, and V.V. Varadan, Microstereolithography and other fabrication techniques for 3D MEMS. 2001: Wiley. 260.
Zhang, X., X. Jiang, and C. Sun, Micro-stereolithography of polymeric and ceramic microstructures. Sensors and Actuators A, 1999. 77: p. 149–156.
Provin, C. and S. Monneret, Complex ceramic-polymer composite microparts made by microstereolithography. IEEE transactions on electronics packaging manufacturing, 2002. 25(1): p. 59–63.
Provin, C., et al., Three-dimensional ceramic microcomponents made using microstereolithography. Advanced Materials, 2003. 15(12): p. 994–997.
Monneret, S., et al., Microfabrication of freedom and articulated alumina-based components. Microsystem Technologies, 2002. 8: p. 368–374.
Bertsch, A., S. Jiguet, and P. Renaud, Microfabrication of ceramic components by microstereolithography. Journal of Micromechanics and Microengineering, 2004. 14(2): p. 197–203.
Jiguet, S., et al. Microstereolithography and ceramic composite three-dimensional parts. In Shaping II. 2002. Gent, Belgium.
Cohen, A., et al. EFAB: Rapid, low-cost desktop micromachining of high aspect ratio true 3-D MEMS. In 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’99). 1999. Orlando, Florida, USA.
Anonymous, Microfabrication-rapid prototyping’s killer application? Rapid Prototyping Report, 1999. 9(6): p. 1–5.
Taylor, C.S., et al. ‘Spatial forming’ a three dimensional printing process. In 8th IEEE Workshop on Micro Electro Mechanical Systems (MEMS’95). 1995.
Bertsch, A., et al. Fine features by integral microstereolithography. In 4th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST’01). 2001. Baden-Baden, Germany.
Bohlmann, H. and R. Götzen. High aspect ratio components through RMPD. In 4th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST’01). 2001. Baden-Baden, Germany.
Varadan, V.K., V.V. Varadan, and S. Motojima. Three dimensional polymeric and ceramic MEMS and their applications. In SPIE Conference on Smart Structures and Materials 1996 – Smart Electronics and MEMS. 1996. San Diego, California, USA.
Yoshimoto, T., et al. Micro stereo lithography system. In SPIE. 2006.
Cabrera, M., et al., Microfabrication of very small objects: Pushing the limits of stereophotolithography. Molecular Crystals and Liquid Crystals, 1998. 315: p. 223–234.
Maruo, S. and H. Inoue, Optically Driven micropump produced by three-dimensional two-photon microfabrication. Applied Physics Letters, 2006. 89: p. 144101-1–144101-3.
Maruo, S., K. Ikuta, and K. Hayato. Light-driven MEMS made by high-speed two-photon microstereolithography. In 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2001). 2001. Interlaken, Switzerland.
Maruo, S., K. Ikuta, and H. Korogi. Optical drive of constrained micromechanisms produced by two-photon microstereolithography with 200 nm resolution. In 4th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST’01). 2001. Baden-Baden, Germany.
Maruo, S., K. Ikuta, and H. Korogi. Remote Light-driven Micromachines Fabricated by 200nm Microstereolithography. In IEEE Nanoelectromechanical systems (NEMS) Conference (IEEE-NANO 2001). 2001.
Maruo, S., K. Ikuta, and H. Korogi, Submicron manipulation tools driven by light in a liquid. Applied Physics Letters, 2003. 82(1): p. 133–135.
Maruo, S. and H. Korogi, Focre-Controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography. Journal of Microelectromechanical Systems, 2003. 12(5): p. 533–539.
Maruo, S., K. Ikuta, and H. Korogi. Direct nanomanipulation tools for biological samples. In MicroTotal Analysis Systems (MicroTAS’02). 2002: Kluwer.
Lee, S.-J., et al., Application of microstereolithography in the development of three-dimensional cartilage regeneration scaffolds. Biomedical Microdevices, 2008. 10: p. 233–241.
Bertsch, A., H. Lorenz, and P. Renaud, 3D microfabrication by combining microstereolithography and thick resist UV lithography. Sensors and Actuators: A, 1999. 73: p. 14–23.
Ballandras, S., et al., Microstereophotolithography and shape memory alloy for the fabrication of miniaturized actuators. Sensors and Actuators A, 1997. 62: p. 741–747.
Bertsch, A., et al. Conception and realization of miniaturized actuators fabricated by Microstereophotolithography and actuated by Shape Memory Alloys. In 3rd France-Japan Congress and 1st Europe-Asia Congress on Mechatronics. 1996.
Calin, M., et al. Design and control of Compliant Microrobots. In 5th IEEE Symposium on Emerging Technologies and Factory Automation ETFA. 1996. Piscataway, NJ, USA.
Tse, A.L., P.J. Hesketh, and D.W. Rosen. Stereolithography on silicon for microfluidics and microsensor packaging. In 4th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST’01). 2001. Baden-Baden, Germany.
Tse, A.L., et al., Stereolithography on silicon for microfluidics and microsensor packaging. Microsystem Technologies, 2003. 9(5): p. 319–323.
Ji, T.S., K.J. Vinoy, and V.K. Varadan, Distributed MEMS phase shifters by microstereolithography on silicon substrates for microwave and millimeter wave applications. Smart Materials and Structures, 2001. 10: p. 1224–1229.
Maruo, S., K. Ikuta, and T. Ninagawa. Multi-polymer microstereolithography for hybrid opto-MEMS. In 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2001). 2001. Interlaken, Switzerland.
Ikuta, K. Biomedical micro device fabricated by micro stereo lithography (IH process) “Metabiotic Device” – a synthetic approach for life science. In 6th International Symposium on Micro Machine and Human Science (MHS’95). 1995.
Mizukami, Y., D. Rajniak, and M. Nishimura. An integrated micro-electrophoretic chip fabricated using a new stereolithographic process. In 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2000). 2000.
Bertsch, A., et al. 3D micromixers – Downscaling large-scale industrial static mixers. In 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2001). 2001. Interlaken, Switzerland.
Bertsch, A., et al., Static micromixers based on large-scale industrial mixer geometry. Lab on a Chip, 2001. 1(1): p. 56–60.
Kim, D.S., et al., A barrier embedded Kenics micromixer. Journal of Micromechanics and Microengineering, 2004. 14: p. 1294–1301.
Ikuta, K. Biochemical IC using micro stereolithography-towards artificial cellular device. In International Microprocesses and Nanotechnology Conference. 2000.
Hasegawa, T. and K. Ikuta. Simple and effective method for hold and connet of chemical IC chip-set. In the Micro Total Analysis Systems 2001 Symposium (microTAS2001). 2001. Monterey, CA, USA.
Hasegawa, T. and K. Ikuta. Silicone rubber coupling for microfluidic devices – Theoretical analysis of sealing properties for interconnection. In Micro Total Analysis Systems (MicroTAS’02). 2002: Kluwer Academic Publishers.
Ikuta, K., A. Takahashi, and S. Maruo. In-chip cell-free protein synthesis from DNA by using biochemical IC chips. In 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2001). 2001. Interlaken, Switzerland.
Nagakura, T., et al. Study of a micro-osmotic valve for insulin injection system in treatment of diabetes mellitus – Using the 3D optical modeling method-. In EMBEC’99. 1999.
Ikuta, K., et al. Micro concentrator with opto-sense micro reactor for biochemical IC chip family – 3D composite structure and experimental verification. In 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’99). 1999. Orlando, Florida, USA.
Hasegawa, T., K. Ikuta, and K. Nakashima. 10-way micro switching valve chip for multi-directional flow control. In 7th International conference on miniaturized chemical and biochemical analysis systems (MicroTAS’03). 2003. Squaw Valley, California, USA.
Carrozza, M.C., et al., A piezoelectric-driven stereolithography-fabricated micropump. Journal of Micromechanics and Microengineering, 1995. 5: p. 177–179.
Accoto, D., M.C. Carrozza, and P. Dario, Modelling of micropumps using unimorph piezoelectric actuators and ball valves. Journal of Micromechanics and Microengineering, 2000. 10: p. 277–281.
Ikuta, K., et al. Fluid drive chips containing multiple pumps and switching valves for biochemical IC family. In 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2000). 2000.
Ikuta, K., T. Hasegawa, and T. Adachi. The optimized SMA micro pump chip applicable to liquids and gases. In Thansducers’01 Eurosensors XV Workshop. 2001. Munich, Germany.
Hasegawa, T., et al., Multi-directional micro-switching valve chip with rotary mechanism. Sensors and Actuators A, 2008. 143: p. 390–398.
Ikuta, K., et al. Micro ultrasonic homogenizer chip made by hybrid microstereolithography. In Micro Total Analysis Systems (MicroTAS’02). 2002: Kluwer.
Ikuta, K., et al. Chemical IC chip family for on-chip cell-free protein synthesis from DNA. In Micro Total Analysis Systems 2001 Symposium (microTAS2001). 2001. Monterey, CA, USA: Kluwer academic publishers.
Ikuta, K., et al. User-assembly, fully integrated micro chemical laboratory using biochemical IC chips for wearablw/implantable applications. In MicroTotal Analysis Systems (microTAS’02). 2002: Kluwer.
Ikuta, K., et al. Biochemical IC chip toward cell free DNA protein synthesis. In 11th IEEE Workshop on Micro Electro Mechanical Systems (MEMS’98). 1998. Heidelberg, Germany.
Ikuta, K., et al. Biochemical IC chip for pretreatment in biochemical experiments. In MEMS 2003. 2003.
Yamada, A., F. Niikura, and K. Ikuta, A three dimensional microfabrication system for biodegradable polymers with high resolution and biocompatibility. Journal of Micromechanics and Microengineering, 2008. 18: p. 1–9.
Liska, R., et al., Photopolymers for rapid prototyping. Journal of Coating Technology and Research, 2007. 4(4): p. 505–510.
Acknowledgements
The authors would like to thank all the research teams who have been involved in the microstereolithography field since this subject has started to be studied, in particular Prof. Koji Ikuta and Prof. Jean-Claude André who had a pioneer vision of this scientific domain.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2011 Springer Science+Business Media, LLC
About this chapter
Cite this chapter
Bertsch, A., Renaud, P. (2011). Microstereolithography. In: Bártolo, P. (eds) Stereolithography. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-92904-0_4
Download citation
DOI: https://doi.org/10.1007/978-0-387-92904-0_4
Published:
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-92903-3
Online ISBN: 978-0-387-92904-0
eBook Packages: EngineeringEngineering (R0)