The sol-gel process is an inorganic polymerization reaction based on a dual hydrolysis/polycondensation mechanism. This polymerization reaction is usually achieved using alkoxide precursors diluted in a solvent (usually alcohol) in the presence of water. It has been used extensively for the preparation of thin films for a wide range of applications. The aerosol-gel process is a new sol-gel deposition technique which was invented and patented at LMGP (INP Grenoble, France) [1]. This process is based on the gaseous transport of an ultrasonically generated aerosol, followed by a room temperature deposition of this aerosol leading to the formation of a liquid film at the surface of a substrate. Subsequently the sol-gel film is transformed into a solid layer (xerogel).


Thin Solid Film Alkoxide Precursor Liquid Phase Deposition Coalescence Mechanism Room Temperature Deposition 
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© Springer Science+Business Media New York 2004

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  • M. Langlet

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