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Abstract

The sol-gel process is an inorganic polymerization reaction based on a dual hydrolysis/polycondensation mechanism. This polymerization reaction is usually achieved using alkoxide precursors diluted in a solvent (usually alcohol) in the presence of water. It has been used extensively for the preparation of thin films for a wide range of applications. The aerosol-gel process is a new sol-gel deposition technique which was invented and patented at LMGP (INP Grenoble, France) [1]. This process is based on the gaseous transport of an ultrasonically generated aerosol, followed by a room temperature deposition of this aerosol leading to the formation of a liquid film at the surface of a substrate. Subsequently the sol-gel film is transformed into a solid layer (xerogel).

Keywords

Thin Solid Film Alkoxide Precursor Liquid Phase Deposition Coalescence Mechanism Room Temperature Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer Science+Business Media New York 2004

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  • M. Langlet

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