Advertisement

The Pyrosol® Process

  • C. Chabrol
  • E. Rouvière
  • F. Schuster

Abstract

Patented in the early 70s [1], the Pyrosol® process belongs to the reactive chemical spraying process family. It was developed for the production of Indium Tin Oxide (ITO) coated glass for use in liquid crystal displays. The Pyrosol® process, which may be considered as a low temperature CVD process, is a method of choice for the deposition of thin oxide films for various applications concerning electrical and optical properties, corrosion protection, coloration, etc.

Keywords

Liquid Crystal Display Thin Oxide Film Acoustic Society ofAmerica Glass Producer Ultrasonic Beam 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    J. Spitz, J.C. Viguié, French Patent 2, 110, 622 (1972)Google Scholar
  2. 2.
    J.W.S. Rayleigh, The theory of sound, 2, New York 344 (1945)Google Scholar
  3. 3.
    R.J. Lang, Journal of Acoustic Society of America, 1, 6 (1962)CrossRefGoogle Scholar
  4. 4.
    G. Blandenet, M. Court, Y. Lagarde, Thin Solid Films, 77, 81 (1981)CrossRefGoogle Scholar
  5. 5.
    J. Dutta, P. Roubeau, T. Emeraud, J.M. Laurent, A. Smith, F. Leblanc, J. Perrin, Application of Pyrosol deposition process for large-area deposition of fluorine-doped tin dioxide thin films, Thin Solid Films, 239, 150 (1994)Google Scholar
  6. 6.
    J.Bollier, R. Jolly, Poster communication at TMS Meeting, Orlando (Florida — USA), 9–13 Feb. 1997Google Scholar
  7. 7.
    C. Chabrol, F. Schuster, E. Serra, G. Le Marois, Fusion Technology, 2, 1227 (1998)Google Scholar

Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • C. Chabrol
  • E. Rouvière
  • F. Schuster

There are no affiliations available

Personalised recommendations