The Pyrosol® Process
Patented in the early 70s , the Pyrosol® process belongs to the reactive chemical spraying process family. It was developed for the production of Indium Tin Oxide (ITO) coated glass for use in liquid crystal displays. The Pyrosol® process, which may be considered as a low temperature CVD process, is a method of choice for the deposition of thin oxide films for various applications concerning electrical and optical properties, corrosion protection, coloration, etc.
KeywordsLiquid Crystal Display Thin Oxide Film Acoustic Society ofAmerica Glass Producer Ultrasonic Beam
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- 1.J. Spitz, J.C. Viguié, French Patent 2, 110, 622 (1972)Google Scholar
- 2.J.W.S. Rayleigh, The theory of sound, 2, New York 344 (1945)Google Scholar
- 5.J. Dutta, P. Roubeau, T. Emeraud, J.M. Laurent, A. Smith, F. Leblanc, J. Perrin, Application of Pyrosol deposition process for large-area deposition of fluorine-doped tin dioxide thin films, Thin Solid Films, 239, 150 (1994)Google Scholar
- 6.J.Bollier, R. Jolly, Poster communication at TMS Meeting, Orlando (Florida — USA), 9–13 Feb. 1997Google Scholar
- 7.C. Chabrol, F. Schuster, E. Serra, G. Le Marois, Fusion Technology, 2, 1227 (1998)Google Scholar