Spin Coating Technique
Spin coating is a simple process for rapidly depositing thin coatings onto relatively flat substrates. The substrate to be covered is held by some rotatable fixture (often using vacuum to clamp the substrate in place) and the coating solution is dispensed onto the surface; the action of spinning causes the solution to spread out and leave behind a very uniform coating of the chosen material on the surface of the substrate. The spin coating process has been studied extensively in the past and much is known about factors that control coating deposition and the final thickness of the deposit that results [1–10].
KeywordsSpin Coating Evaporative Cool Thin Coating Glass Producer Rotational Acceleration
Unable to display preview. Download preview PDF.
- 3.D. F. Bornside, C. W. Macosko, L. E. Scriven, On the modeling of Spin coating, J. Imaging Techn., 13, 122 (1987)Google Scholar
- 8.T. Ohara, Y. Matsumoto, H. Ohashi, The film formation dynamics in spin coating, Phys. Fluids, A1, 1949 (1989)Google Scholar
- 11.More extensive information about coating quality and the spin coating process can be found at: http://www.mse.arizona.edu/faculty/bimie/Coatings/index.htmGoogle Scholar
- 12.D. E. Haas, J. N. Quijada, S. J. Picone, D. P. Birnie, III, Effect of Solvent Evaporation Rate on Skin Formation During Spin Coating of Complex Solutions, in Sol-Gel Optics V, B. S. Dunn, E. J. A. Pope, H. K. Schmidt, M. Yamane (eds.), Proc. SPIE, 3943, 280 (2000)Google Scholar
- 14.D. P. Birnie, III, Combined Flow and Evaporation During Spin Coating of Complex Solutions, J. Non-Crystalline Solids, 218, 174 (1997)Google Scholar
- 18.PZT coatings were made using a recipe based on that developed by R. A. Assink and R. W. Schwartz, Chem. Mat., 5, 51 1(1993)Google Scholar
- 22.J. Thomson, On certain curious motions observable at the surfaces of wine and other alcoholic liquors, Phil. Mag., 10, 330 (1855)Google Scholar