Ablation of sol-gel coatings by excimer laser irradiation
Sol-gel coating are usually dried and thermally treated for densification and then patterned for the final application. However the temperature and the duration of conventional heat treatments using hot plate and oven are often limited due to the poor thermal stability of the materials and to the diffusion effects which may occur at the film/substrate interface.
KeywordsExcimer Laser Photochemical Process Ablation Depth Conventional Heat Treatment Poor Thermal Stability
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