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Ablation of sol-gel coatings by excimer laser irradiation

  • S. Janicot
  • B. Godard

Abstract

Sol-gel coating are usually dried and thermally treated for densification and then patterned for the final application. However the temperature and the duration of conventional heat treatments using hot plate and oven are often limited due to the poor thermal stability of the materials and to the diffusion effects which may occur at the film/substrate interface.

Keywords

Excimer Laser Photochemical Process Ablation Depth Conventional Heat Treatment Poor Thermal Stability 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • S. Janicot
  • B. Godard

There are no affiliations available

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