Ablation of sol-gel coatings by excimer laser irradiation

  • S. Janicot
  • B. Godard


Sol-gel coating are usually dried and thermally treated for densification and then patterned for the final application. However the temperature and the duration of conventional heat treatments using hot plate and oven are often limited due to the poor thermal stability of the materials and to the diffusion effects which may occur at the film/substrate interface.


Excimer Laser Photochemical Process Ablation Depth Conventional Heat Treatment Poor Thermal Stability 
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  1. 1.
    D.J. Taylor, B.D. Fabes, Laser Processing of sol-gel coatings, Journal of Non-crystalline Solids, 147 & 148, 457 (1992)CrossRefGoogle Scholar
  2. 2.
    T.C. Zaugg, B.D. Fabes, B.J.J. Zelinski, Waveguide formation by laser irradiation of sol-gel coatings, SPIE, Submolecular Glass Chemistry and Physics, 1590, 24 (1991)Google Scholar
  3. 3.
    B. Godard, M. Vannier, Compact efficient discharge lasers in XeF, KrF and fluorine, Opt. Commun., 18, 206 (1976)CrossRefGoogle Scholar
  4. 4.
    B. Godard, P. Murer, M. Stehlé, J. Bonnet, D. Pigache; Realization of a 1 kW XeCl laser, SPIE, 9th International Symposium on Gas flow and Chemical Laser, 1810, 372 (1992)Google Scholar
  5. 5.
    B. Shen, R. Wang, D. Lu, H. Huang, L. Du, Excimer laser deep micro-structuring for LIGA process, in: SPIE Proc, volume 3550, Laser Processing of Materials and Industrial Applications 11, 502 (1998)CrossRefGoogle Scholar
  6. 6.
    G.H. Pettit, R. Sauerbrey, Pulsed ultraviolet laser ablation, Appl. Phys. A, 56, 51 (1993)CrossRefGoogle Scholar
  7. 7.
    G. Gorodatsky, T.G. Kazyaka, R.L. Melcher, R. Srinivasan, Calorimetric and acoustic study of ultraviolet laser of polymers, Appl. Phys. Lett., 46, 828 (1985)CrossRefGoogle Scholar

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© Springer Science+Business Media New York 2004

Authors and Affiliations

  • S. Janicot
  • B. Godard

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