Sintering and Patterning Using Laser Irradiation

  • M. A. Aegerter


Lasers find today widespread applications for the preparation, processing and characterization of materials. In the field of coating processing, they are used to deposit layers from gaseous precursors by the so-called Laser Chemical Vapor Process (LCVD) [1] where either thermal (pyrolytic) [2, 3] or photochemical reactions [2] are produced at or near the substrate surface by light absorption. Hybrid LCVD processes [4] and the use of liquid precursors have been also reported [3, 4]. Fast pulsed lasers are used to deposit coatings by inducing evaporation or sputtering of solid targets [1].


Glass Producer Laser Chemical Liquid Precursor Material Research Society Symposium Proceeding Fuse Quartz Substrate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    H.G. Rubahn, Laseranwendungen in der Oberflächenphysik und Materialbearbeitung, Teubner Stuttgart (1996)Google Scholar
  2. 2.
    I.W. Boyd, Laser Processing of Thin Films and Microstructure, Springer Verlag (1987)CrossRefGoogle Scholar
  3. 3.
    D. Bäuerle, Laser Processing and Chemistry, Springer, Berlin Heidelberg (1996)Google Scholar
  4. 4.
    R.F. Louh, Sinter-patterning of oxide dielectric and high Te films by pulsed Nd:YAG laser, Thesis, University of Illinois, Urbana-Champaign, Illinois/USA (1991)Google Scholar
  5. 5.
    B.D. Fabes, D.J. Taylor, L. Weisenbach, M.A. Stuppi, D.L. Klein, L.J. Raymond, B.J.J. Zelinski, D.P. Birnie III, Laser Processing of Channel Waveguide Structures in Sol-Gel Coatings, in: Sol-Gel Optics, Proc. SPIE, volume 1328, 319 (1990)Google Scholar
  6. 6.
    D.J. Taylor, B.D. Fabes, M.G. Steinthal, Laser densification of sol-gel coatings, in: Better Ceramics Through Chemistry IV, MRS Proc, 180, 1047 (1990)Google Scholar
  7. 7.
    B.D. Fabes, Laser processing of sol-gel coating, in: Sol-Gel science and technology, Sol-Gel Optics: Processing and application, L.C. Klein (ed.), Kluwer Boston, 483 (1994)CrossRefGoogle Scholar
  8. 8.
    H. Krug, F. Tiefensee, P.W. Oliveira, H. Schmidt, Organic-inorganic composition materials: optical properties of laser patterned and protective coated waveguides, in: Sol-Gel Optics II, Proc. SPIE, volume 1758, 448 (1992)Google Scholar
  9. 9.
    N. Tohge, K. Shinmon, T. Minami, Effects of UV-irradiation on the formation of oxide thin films from chemically modified nickel-alkoxides, J. Sol-Gel Science and Technology, 2, 581 (1994)CrossRefGoogle Scholar
  10. 10.
    G. Zhao, T. Tohge, Preparation of photosensitive gel films and fine patterning of amorphous Al2O3-SiO2 thin films, Mat. Res. Bull., 33, 21 (1998)CrossRefGoogle Scholar
  11. 11.
    M. Guglielmi, P. Colombo, L. Mancinelli Delgi Esposti, G.C. Righini, S. Pelli, Planar and strip optical waveguides by sol-gel method and laser densification, in: Glasses for Optoelectronics II, G.C. Righini (ed.), Proc. SPIE, volume 1513, 44 (1991)Google Scholar
  12. 12.
    M. Guglielmi, P. Colombo, L. Mancinelli Delgi Esposti, G.C. Righini, S. Pelli, V. Rigato, Characterization of laser-densified sol-gel films for the fabrication of planar and strip optical waveguides, Journal of Non-Crystalline Solids, 147&148, 641 (1992)CrossRefGoogle Scholar
  13. 13.
    B.D. Fabes, B.J.J. Zelinski, D.J. Taylor, L. Weisenbach, S. Boggavarapu, D.Z. Dent, Laser densification of optical films, in: Sol-Gel Optics II, Proc. SPIE, volume 1758, 227 (1992)Google Scholar
  14. 14.
    U.J.J. Zelinski, B.D. Fabes, L. Weisenbach, T.C. Zaugg, Sol-gel processing of passive components for integrated optics, in: Chem. Process. Adv. Mater., L.L. Hench, J.K. West (eds.), Wiley New York, 467 (1992)Google Scholar
  15. 15.
    N.J. Arfsten, B. Lintner, M. Fleming, O. Anderson, C.R. Ottermann, Laser densification of solgel derived TiO2 thin films, Materials Research Society Symposium Proceedings, 271, 449 (1992)CrossRefGoogle Scholar
  16. 16.
    D.J. Taylor, B.D. Fabes, Laser processing of sol-gel coatings, Journal of Non-Crystalline Solids, 147&148, 457 (1992)CrossRefGoogle Scholar
  17. 17.
    T.C. Zaugg, B.D. Fabes, L.W. Weisenbach, B.J.J. Zelinski, Waveguide formation by laser irradiation of sol-gel coatings, in: Submolecular Glass Chemistry and Physics, P. Bray, N.J. Kreidl (eds.), Proc. SPIE, volume 1590, 26 (1991)Google Scholar
  18. 18.
    T. Chia, L.L. Flench, Micro-optical arrays by laser densification of gel-silica matrices, Sol-Gel Optics II, Proc. SPIE, volume 1758, 215 (1992)Google Scholar
  19. 19.
    L.L. Hench, J.L. Nogues, Sol-gel processing of net shape silica optics, in: Sol-Gel science and technology, Sol-Gel Optics: Processing and application, L.C. Klein (ed.), Kluwer Boston, 59 (1994)Google Scholar
  20. 20.
    D.W. Ganz, Ph.D. Thesis, Herstellung transparenter, leitfähiger antimon-dotierter Zinndioxid-Schichten nach dem Sol-Gel-Prozeß mittels CO2-Laserstrahlung, Institut für Neue Materialien und Universität des Saarlandes, Saarbrücken/Germany (1998)Google Scholar
  21. 21.
    D. Ganz, G. Gasparro, J. Otto, A. Reich, N.J. Arfsten, M.A. Aegerter, Fast CO2 laser firing of sol-gel SnO2:Sb coatings, J. Materials Science Letters, 16, 1233 (1997)Google Scholar
  22. 22.
    D. Ganz, A. Reich, M.A. Aegerter, Laser firing of transparent conducting SnO2 sol-gel coatings, J. Non-Crystalline Solids, 218, 242 (1997)CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 2004

Authors and Affiliations

  • M. A. Aegerter

There are no affiliations available

Personalised recommendations