Three-Dimensional Orientation Microscopy by Serial Sectioning and EBSD-Based Orientation Mapping in a FIB-SEM

  • Stefan Zaefferer
  • Stuart I. Wright

Conventional EBSD-based orientation microscopy is a 2-dimensional (2D) characterization method, which is applied to plane cuts through a sample. Statistical stereological techniques can be used to gain insight into the 3D aspects of microstructure, as in, e.g., Adams (1986), Adams et al.


Serial Section Fiducial Marker Inverse Pole Figure Beam Shift Stage Tilt 
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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Max Planck Institute for Iron ResearchMax-Planck-Straße 1D-40237 DüsseldorfGermany
  2. 2.EDAX-TSLDraperUSA

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