Electron Backscatter Diffraction in Low Vacuum Conditions

  • Bassem S. El-Dasher
  • Sharon G. Torres

Most current scanning electron microscopes (SEMs) have the ability to analyze samples in a low vacuum mode, whereby a partial pressure of water vapor is introduced into the SEM chamber, allowing the characterization of nonconductive samples without any special preparation. Although the presence of water vapor in the chamber degrades electron backscatter diffraction (EBSD) patterns, the potential of this setup for EBSD characterization of nonconductive samples is immense. In this chapter we discuss the requirements, advantages, and limitations of low vacuum EBSD (LV-EBSD), and explain how this technique can be applied to a two-phase ceramic composite, as well as hydrated biominerals, as specific examples of when LV-EBSD can be invaluable.


Dwell Time Energy Dispersive Spectroscopy Silicon Single Crystal EBSD Pattern Cascade Electron 
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Part of this work was performed under the auspices of the U.S. Department of Energy by Lawrence Livermore National Laboratory, in part under Contract W-7405-Eng-48, and in part under Contract DE-AC52-07NA27344. We gratefully acknowledge Jennifer Giocondi and Christine Orme at LLNL for the brushite single crystals, as well as Tomoko Sano and James Campbell of the Army Research Laboratory for the ceramic composite.


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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Lawrence Livermore National LaboratoryLivermoreUSA
  2. 2.Lawrence Livermore National LaboratoryLivermoreUSA

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