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A Review of In Situ EBSD Studies

  • Stuart I. Wright
  • Matthew M. Nowell
Chapter

In the first fully automated electron backscatter diffraction (EBSD) system (Wright and Adams 1992), later termed orientation imaging microscopy (OIM) (Adams et al. 1993), four seconds were required to index each EBSD pattern. A few in situ studies were performed using these early systems involving a tensile stage (Weiland et al. 1996) and a heating stage (Humphreys and Ferry 1996). While this was a big step forward, modern commercial systems are capable of speeds over three orders of magnitude faster. Fortunately, while automated EBSD technology was advancing, scanning electron microscope (SEM) technology was also advancing.

Keywords

Heating Stage Orientation Imaging Microscopy AlMgSi Alloy EBSD Pattern Tungsten Carbide Particle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgements

The authors acknowledge the contribution of Seiichi Suzuki of TSL Solutions for the engineering of the heating stage; Robert Kubic and Raja Mishra of General Motors for providing access to the in situ tensile stage; Tom Lillo of Idaho National Engineering and Environmental Laboratory for providing the copper ECAE sample; and Jeff Farrer of Brigham Young University for the gold wire mount results.

References

  1. Adams BL, Wright SI, Kunze K (1993) Orientation imaging: The emergence of a new microscopy. Metall Trans A 24: 819–831CrossRefGoogle Scholar
  2. Barnett MR, Keshavarz Z, Nave MD (2005) Microstructural features of rolled Mg-3Al-1Zn. Metall Mater Trans A 36:1697–1704CrossRefGoogle Scholar
  3. Bjerkaas H, Fjeldbo SK, Roven HJ, Hjelen J, Chiron R, Furu T (2006) Study of microstructure and texture evolution using in situ EBSD investigations and SE imaging in SEM. Mater Sci Forum 519–521:809–814CrossRefGoogle Scholar
  4. Boehlert CJ, Longanbach SC, Nowell M, Wright S (2008) The evolution of grain-boundary cracking evaluated through in situ tensile-creep testing of Udimet alloy 188. J Mater Res 23:500–506CrossRefADSGoogle Scholar
  5. Buerke A, Wendrock H, Kötter T, Menzel S, Wetzig K, Glasow AV (1999) In situ electromigration damage of Al interconnect lines and the influence of grain orientation. Mater Res Soc Proc 563:109–114Google Scholar
  6. Choi ZS, Monig R, Thompson CV (2008) Effects of microstructure on the formation, shape, and motion of voids during electromigration in passivated copper interconnects. J Mater Res 23:383–391CrossRefADSGoogle Scholar
  7. Cornen M, Le Gall R (2005) In situ recrystallization imaging of polycrystalline Ni-S alloy using SEM. Mater Res Soc Proc 907:63–67Google Scholar
  8. De Hosson JTM, Ocelik V (2003) Functionally graded materials produced with high power lasers. Mater Sci Forum 426–432:123–130CrossRefGoogle Scholar
  9. Field DP (1997) Recent advances in the application of orientation imaging. Ultramicroscopy 67:1–9CrossRefGoogle Scholar
  10. Field DP, Nowell MM, Trivedi P, Wright SI, Lillo TM (2004) Local orientation gradient and recrystallization of deformed copper. Solid State Phenom 105:157–162CrossRefGoogle Scholar
  11. Geiss RH, Roshko A, Bertness KA, Keller RR (2003) Electron backscatter diffraction for studies of localized deformation. In: Weertman JR, Fine M, Faber K, King W, Liaw P (eds) Electron microscopy: Its role in materials science—Mike Meshii Symposium, TMS, Warrendale 329–336Google Scholar
  12. Han JH, Baeck SM, Oh KH, Chung YH (2002) Orientation correction method of distorted samples during in situ deformations using a high resolution EBSD. Mater Sci Forum 408–412:203–208CrossRefGoogle Scholar
  13. Huang Y, Humphreys FJ, Ridley N (2003) In situ observations of microstructural evolution during deformation of Supral 100. Mater Sci Forum 447–448:381–386Google Scholar
  14. Huang Y, Fu Q, Pan C (2007) ‘In situ-tracking’ observation of stainless steel microstructural development during elevated service using EBSD and SEM. Mater Sci Forum 561–565:2087–2090CrossRefGoogle Scholar
  15. Humphreys FJ, Ferry M (1996) Combined in situ annealing and EBSD of deformed aluminium alloys. Mater Sci Forum 217–222:529–534CrossRefGoogle Scholar
  16. Hurley PJ, Humphreys FJ (2004) A study of recrystallization in single-phase aluminium using in situ annealing in the scanning electron microscope. J Microsc 213:225–234CrossRefPubMedMathSciNetGoogle Scholar
  17. Kajihara K, Matsumoto K, Matsumoto K (2006) In situ SEM-EBSP observations of recrystallization texture formation in Al-3mass%Mg alloy. Mater Sci Forum 519–521:1579–1584CrossRefGoogle Scholar
  18. Karlsen M, Hjelen J, Grong Ø, Rorvik G, Chiron R, Schubert R, Nilsen E (2008) SEM/EBSD based in situ studies of deformation induced phase transformations in supermartensitic stainless steels. Mater Sci Technol 24:64–67CrossRefGoogle Scholar
  19. Kirch DM, Ziemons A, Lischewski I, Molodova X, Molodov DA, Gottstein G (2008) Laser powered heating stage in a scanning electron microscope for microstructural investigations at elevated temperatures. Rev Sci Instrum 79-043902:1–8Google Scholar
  20. Lee H-J, Han HN, Kim DH, Lee U-h, Oh KH, Cha P-R (2006) In situ observation of the grain growth of the copper electrodeposits for ultralarge scale integration. Appl Phys Lett 89-161924:1–3Google Scholar
  21. Lens A, Maurice C, Driver JH (2005) Grain boundary mobilities during recrystallization of Al-Mn alloys as measured by in situ annealing experiments. Mater Sci Eng A 403: 144–153CrossRefGoogle Scholar
  22. Matteson TL, Schwarz SW, Houge EC, Kempshall BW, Giannuzzi LA (2002) Electron backscattering diffraction investigation of focused ion beam surfaces. J Electron Mater 31: 33–39CrossRefADSGoogle Scholar
  23. Mattissen D, Wæro A, Molodov DA, Shvindlerman LS, Gottstein G (2004) In situ investigation of grain boundary and triple junction kinetics in aluminium—10 p.p.p. magnesium. J Microsc 213:257–261CrossRefPubMedMathSciNetGoogle Scholar
  24. Meyer MA, Zschech E (2007) New microstructure-related EM degradation and failure mechanisms in Cu interconnects with CoWP coating. AIP Conf Proc 945:107–114CrossRefADSGoogle Scholar
  25. Michael JR (2006) Gallium phase formation in Cu during 30 kV Ga+ FIB milling. Microsc Microanal 12:1248–1249 CDCrossRefADSGoogle Scholar
  26. Michael JR, Brewer LN, Miller DC, Zavadil KR, Prasad SV, Kotula PG (2006) Microscopy and microanalysis of nanoscale materials. Microsc Today 6–14Google Scholar
  27. Mirpuri K-k, Szpunar J (2005) Orientation and microstructure dependence of electromigration damage in damascene Cu interconnect lines. Mater Sci Forum 495–497:1443–1448CrossRefGoogle Scholar
  28. Mirpuri K, Wendrock H, Menzel S, Wetzig K, Szpunar J (2004) High temperature behavior of Cu films studied in situ by electron backscatter diffraction. Microelectron Eng 76: 160–166CrossRefGoogle Scholar
  29. Mirpuri K, Wendrock H, Menzel S, Wetzig K, Szpunar J (2006) Texture evolution in copper film at high temperature studied in situ by electron backscatter diffraction. Thin Solid Films 496:703–717CrossRefADSGoogle Scholar
  30. Nakamichi H, Humphreys FJ, Bate PS, Brough I (2007) In situ EBSD observation of the recrystallization of an IF steel at high temperature. Mater Sci Forum 550:441–446CrossRefGoogle Scholar
  31. Oh ST, Park KK, Han HN, Park S-H, Oh KH (2002) Transformation behavior of retained austenite in hydroformed TRIP steel. Mater Sci Forum 408–412:1341–1346CrossRefGoogle Scholar
  32. Panchanadeeswaran S, Doherty RD, Becker R (1996) Direct observation of orientation change by channel die compression of polycrystalline aluminum—use of a split sample. Acta Mater 44:1233–1262CrossRefGoogle Scholar
  33. Phelan D, Dippenaar R (2004) Widmanstätten ferrite plate formation in low-carbon steels. Metall Mater Trans A 35A:3701–3706CrossRefGoogle Scholar
  34. Piazolo S, Sursaeva VG, Prior DJ (2004) Grain growth in Al: First results from a combined study of bulk and in situ experiments using a columnar structured Al foil. Mater Sci Forum 467–470:935–940CrossRefGoogle Scholar
  35. Piazolo S, Jessell MW, Prior DJ, Spiers C (2006) Temperature dependent grain boundary migration in deformed then annealed material: Observations from experimentally deformed synthetic rock salt. Tectonophysics 427:55–71CrossRefADSGoogle Scholar
  36. Pöter B, Parezanovic I, Spiegel M (2005) In situ scanning electron microscopy and electron backscatter diffraction investigation on the oxidation of pure iron. Mater High Temp 22:185–194CrossRefGoogle Scholar
  37. Seaton NCA, Prior DJ (2004) Nucleation during recrystallisation in Ti-SULC steel. Mater Sci Forum 467–470:93–98CrossRefGoogle Scholar
  38. Seward GGE, Prior DJ, Wheeler J, Celotto S, Halliday DJM, Paden RS, Tye MR (2002) High-temperature electron backscatter diffraction and scanning electron microscopy imaging techniques: In situ investigations of dynamic processes. Scanning 24:232–240PubMedCrossRefGoogle Scholar
  39. Seward GGE, Celotto S, Prior DJ, Wheeler J, Pond RC (2004) In situ SEM-EBSD observations of the HCP to BCC phase transformation in commercially pure titanium. Acta Mater 52:821–832CrossRefGoogle Scholar
  40. Taheri ML, Rollett AD, Weiland H (2004) In situ quantification of solute effects on grain boundary mobility and character in aluminum alloys during recrystallization. Mater Sci Forum 467–470:997–1002CrossRefGoogle Scholar
  41. Takata N, Ikeda K, Nakashima H, Tsuji N (2007) In situ EBSP analysis of grain boundary migration during recrystallization in pure aluminum foils. Mater Sci Forum 558–559: 351–356CrossRefGoogle Scholar
  42. Takigawa Y, Sakaida Y, Yasutomi Y, Ogawa S (2000) Simulation of microcrack propagation behavior in polycrystalline alumina having initial residual stress field. Ceram Eng Sci Proc 21:213–218CrossRefGoogle Scholar
  43. Tatschl A, Kolednik O (2003) On the experimental characterization of crystal plasticity in polycrystals. Mater Sci Eng A 342:152–168CrossRefGoogle Scholar
  44. Van der Zwaag S, Anselmino E, Miroux A, Prior D (2006) In situ SEM observations of moving interfaces during recrystallisation. Mater Sci Forum 519–521:1341–1348CrossRefGoogle Scholar
  45. van Haaften WM, Bi Y, van Leeuwen Y, Colijn J, Howe A (2003) Recrystallisation nucleation during annealing of Ti-SULC steel. Mater Sci Forum 426–432:1163–1168CrossRefGoogle Scholar
  46. Watanabe T, Obara K, Tsurekawa S (2004) In situ observations on interphase boundary migration and grain growth during α/γ phase transformation in iron alloys. Mater Sci Forum 467–470:819–824CrossRefGoogle Scholar
  47. Weiland H, Field DP, Adams BL (1996) Local texture evolution during deformation by in situ OIM analysis. In: Liang Z, Zuo L, Chu Y (eds) Proceedings of the eleventh international conference on textures of materials. International Academic Publishers, Xi’an, China 1414–1419Google Scholar
  48. Wheeler J, Prior DJ, Seward GGE, Howe AA, Paden RS (2002) Hot pursuit: Capturing microstructure development in steel. Steel World 7:1–6Google Scholar
  49. Wright SI, Adams BL (1992) Automatic-analysis of electron backscatter diffraction patterns. Metall Trans A 23:759–767CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.EDAX-TSLDraperUSA
  2. 2.EDAX-TSLDraperUSA

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