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3-D Nano Object Recognition by Use of Phase Sensitive Scatterometry

  • Daesuk Kim
  • Byung Joon Baek
  • Bahram Javidi
Chapter

Introduction

Optical correlation techniques have proven to be very useful in various two- and three-dimensional pattern recognition applications. Recently, there has been increased interest in various imaging based 2-D and 3-D optical information sensing and recognition [1,2,3,4,5]. In particular, 3-D information processing based on digital holography has been proposed to extend optical correlation techniques to 3-D object recognition [4,5]. However, all such approaches were mainly based on an imaging technique which has an inherent optical diffraction limit and, for that reason, recognizing nano-size patterns smaller than around 1 μm could not be handled through such an imaging based optical approach. So far, one possible option is the SEM (Scanning Electron Microscope) based 2-D imaging approach. However, because SEM technology can only provide 2-D imaging information and it requires a vacuum environment, it has not been the preferred method in industrial fields. Recently, to...

Keywords

Spectroscopic Ellipsometry Digital Holography Electric Field Amplitude Recognition Capability Input Object 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Division of Mechanical & Aero System EngineeringChonbuk National UniversityRepublic of Korea

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