3-D Nano Object Recognition by Use of Phase Sensitive Scatterometry

  • Daesuk Kim
  • Byung Joon Baek
  • Bahram Javidi


Optical correlation techniques have proven to be very useful in various two- and three-dimensional pattern recognition applications. Recently, there has been increased interest in various imaging based 2-D and 3-D optical information sensing and recognition [1,2,3,4,5]. In particular, 3-D information processing based on digital holography has been proposed to extend optical correlation techniques to 3-D object recognition [4,5]. However, all such approaches were mainly based on an imaging technique which has an inherent optical diffraction limit and, for that reason, recognizing nano-size patterns smaller than around 1 μm could not be handled through such an imaging based optical approach. So far, one possible option is the SEM (Scanning Electron Microscope) based 2-D imaging approach. However, because SEM technology can only provide 2-D imaging information and it requires a vacuum environment, it has not been the preferred method in industrial fields. Recently, to...


Spectroscopic Ellipsometry Digital Holography Electric Field Amplitude Recognition Capability Input Object 
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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Division of Mechanical & Aero System EngineeringChonbuk National UniversityRepublic of Korea

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