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3-D Nano Object Recognition by Use of Phase Sensitive Scatterometry

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Authors and Affiliations

  1. Division of Mechanical & Aero System Engineering, Chonbuk National University, Jeonju 561-756, Republic of Korea

    Daesuk Kim

Authors
  1. Daesuk Kim
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  2. Byung Joon Baek
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  3. Bahram Javidi
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Corresponding author

Correspondence to Daesuk Kim .

Editor information

Editors and Affiliations

  1. Electrical and Computer Engineering Dept, University of Connecticut, Fairfield Rd. 371, Storrs, 06269-2157, USA

    Bahram Javidi

  2. Science & Technical Res. Lab., (STRL), NHK Nippon Hoso Kyokau, Kinuta 1-10-11, Tokyo, 157-8510, Japan

    Fumio Okano

  3. School of Computer and Communication Engineering, Daegu University, Hawologog-dog 39-1, Seoul, 136-791, Korea, Republic of (South Korea)

    Jung-Young Son

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Kim, D., Baek, B.J., Javidi, B. (2009). 3-D Nano Object Recognition by Use of Phase Sensitive Scatterometry. In: Javidi, B., Okano, F., Son, JY. (eds) Three-dimensional Imaging, Visualization, and Display. Springer, New York, NY. https://doi.org/10.1007/978-0-387-79335-1_23

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  • DOI: https://doi.org/10.1007/978-0-387-79335-1_23

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  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-0-387-79334-4

  • Online ISBN: 978-0-387-79335-1

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

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