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Cathodic Arcs pp 227–263Cite as

Cathodic Arc Sources

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Part of the book series: Springer Series on Atomic, Optical, and Plasma Physics ((SSAOPP,volume 50))

Abstract

The chapter on arc sources and systems is somewhat unusual because it focuses on technology and engineering, rather than on physics. Here, practical designs for DC and pulsed arc sources are presented. Many details are covered such as how to trigger the arc and how to steer the apparent spot motion. From source design we move on and consider the whole system, which is generally either a batch coater or, less often, an in-line coater.

Gera’s Rule: The arc discharge does not run well when the anode cable is disconnected.

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Authors and Affiliations

  1. Berkeley, CA, USA

    André Anders

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  1. André Anders
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Anders, A. (2008). Cathodic Arc Sources. In: Cathodic Arcs. Springer Series on Atomic, Optical, and Plasma Physics, vol 50. Springer, New York, NY. https://doi.org/10.1007/978-0-387-79108-1_5

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  • DOI: https://doi.org/10.1007/978-0-387-79108-1_5

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  • Online ISBN: 978-0-387-79108-1

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