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Mechanical Characterization of Low-Dimensional Structures Through On-Chip Tests

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Acknowledgments

The contributions of EU NoE Design for Micro & Nano Manufacture (PATENT-DfMM), contract No.: 507255 and of Cariplo foundation contract no. 2005–06–49 “Innovative models for the study of the behaviour of solids and fluids in micro/nano-electromechanical systems” are gratefully acknowledged.

Author information

Authors and Affiliations

  1. Department of Structural Engineering, Politecnico di Milano, piazza Leonardo da Vinci 32, 20133, Milano, Italy

    Alberto Corigliano &  Fabrizio Cacchione

  2. MEMS Product Division, STMicroelectronics, via Tolomeo 1, 20010, Cornaredo, (Milano), Italy

    Sarah Zerbini

Authors
  1. Alberto Corigliano
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  2. Fabrizio Cacchione
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  3. Sarah Zerbini
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Corresponding author

Correspondence to Fabrizio Cacchione .

Editor information

Editors and Affiliations

  1. Dept. Chemical &, Materials Engineering, University of Kentucky, Lexington, 40506, USA

    Fuqian Yang

  2. Dept. Mechanical Engineering, University of Rochester, Rochester, 14627, USA

    James C.M. Li

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Corigliano, A., Cacchione, ., Zerbini, S. (2008). Mechanical Characterization of Low-Dimensional Structures Through On-Chip Tests. In: Yang, F., Li, J. (eds) Micro and Nano Mechanical Testing of Materials and Devices. Springer, New York, NY. https://doi.org/10.1007/978-0-387-78701-5_13

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