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Metrologies for Mechanical Response of Micro- and Nanoscale Systems

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Acknowledgments

The contributions of current and former NIST coworkers (R. Geiss, M. Kopycinska-Müller, and E. Langlois) are gratefully acknowledged. We also value interactions with the research groups of J. Turner (Univ. Nebraska–Lincoln) and W. Arnold and U. Rabe (Fraunhofer Institut für Zerstörungsfreie Prüfverfahren, Saarbrücken, Germany). Nanoindentation measurements for comparison to contact-resonance AFM results were provided by N. Jennett (National Physical Laboratory, UK), A. Rar (then at Univ. Tennessee–Knoxville), and D. Smith (NIST). We thank E. Arzt (Max-Planck-Institute for Metals Research, Stuttgart, Germany), C. Volkert (Univ. Göttingen, Germany), and R. Mönig (Forschungszentrum Karlsruhe, Germany) for fruitful collaborations on development of electrical test methods for thermal fatigue. We are grateful for support from the NIST Office of Microelectronics Programs.

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  1. National Institute of Standards and Technology, Materials Reliability Division, Boulder, CO, 80305, USA

    Robert R. Keller, Donna C. Hurley, David T. Read & Paul Rice

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  1. Robert R. Keller
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  2. Donna C. Hurley
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Correspondence to Robert R. Keller .

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Editors and Affiliations

  1. Dept. Chemical &, Materials Engineering, University of Kentucky, Lexington, 40506, USA

    Fuqian Yang

  2. Dept. Mechanical Engineering, University of Rochester, Rochester, 14627, USA

    James C.M. Li

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Keller, R., Hurley, D., Read, D., Rice, P. (2008). Metrologies for Mechanical Response of Micro- and Nanoscale Systems. In: Yang, F., Li, J. (eds) Micro and Nano Mechanical Testing of Materials and Devices. Springer, New York, NY. https://doi.org/10.1007/978-0-387-78701-5_12

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