Nanocrystalline Silicon Ballistic Electron Emitter
The finding of visible photoluminescence from nanocrystalline silicon (NS) at room temperature and the development of light-emission device was important step toward silicon-based optoelectronics technology. Subsequent research revealed that these light emission may occur due to silicon nanostructure and intensive research and development to achieve high-efficient, high-intensity, and tunable visible light-emitting devices based on NS was conducted all over the world. In 1998, a novel cold cathode technology based on nanocrystallised polysili-con (NPS) layer was reported by the authors. Its electron emission characteristics strongly suggest that electrons injected to the NPS layer are transported quasibal-listically. It showed various excellent characteristics as compared with the conventional FEDs and it was termed ballistic electron surface-emitting display (BSD). In order to demonstrate the possibility of the realisation of large panel FPD, we firstly developed quartz glass-based BSD. We also developed low temperature process to fabricate the BSD on a TFT and a PDP glass substrate. Electrochemical oxidation technique was one of the key process concepts to reduce process temperature. It was also shown that the BSD had excellent thermal stability and a frit-sealed model was fabricated. In this section, we first overview the characteristics of the BSD cold cathode and discuss the mechanism of ballistic electron emission model from the NPS nanostructure. Subsequently, we discuss the relationship between emission efficiency and nanostructure. Finally, w e demonstrate the BSD on glass substrate. We describe the 2.6- and 7.6-in. diagonal full-colour BSD fabricated on a glass substrate with low temperature process and demonstrate strong possibility of the process compatibility for a large panel BSD.
KeywordsElectron Emission Thermal Desorption Spectrometry Emission Current Density Cold Cathode Nanocrystalline Silicon
The authors would like to thank the colleagues of the Advanced Technology Research Laboratory at Matsushita Electric Works, Ltd. and the Tokyo University of Agriculture and Technology for their useful discussion and sample measurement support. Also, the authors would like to thank various companies for their effort to development of the materials and equipments for BSD technology.
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