Skip to main content
SpringerLink
Log in

Si-Rich Dielectrics for Active Photonic Devices

  • Chapter
Device Applications of Silicon Nanocrystals and Nanostructures

Part of the book series: Nanostructure Science and Technology ((NST))

  • 954 Accesses

Abstract

The quest to develop an efficient Si-based light emitter has stimulated research worldwide. Among the several approaches being considered, enhancing the probability of light emission through the use of Si nanocrystals embedded in SiO2 shows considerable promise due to the demonstration of efficient room temperature light emission and optical gain. In this chapter, we compare the nucleation, light emission, and emission sensitization of Si nanocrystals embedded in Si-rich oxide and Si-rich nitride. Based on the results of our study, we identify Si nanocrystal emission from Si-rich nitride and Er doping of Si-rich oxide as materials systems that satisfy the requirements of CMOS compatible processing and high emission efficiency for integration with Si-based electronics. We also present PbS quantum dot emission sensitization through Si nanocrystals in Si-rich nitride, an alternative approach to achieving efficient infrared emission on a Si platform. The improved electrical properties and high refractive index of Si-rich nitride also allows for the fabrication of electroluminescent devices with small footprints and active, complex photonic crystal devices for multiwavelength applications.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution
Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 89.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 119.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. D. K. Sparacin, S. J. Spector and L. C. Kimerling, IEEE J. Lightwave Technol., 23(8), 2455 (2005).

    Article  CAS  Google Scholar 

  2. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu and M. Paniccia, Nature, 427, 615 (2004).

    Article  CAS  Google Scholar 

  3. V. R. Almeida, C. A. Barrios, R. R. Panepucci and M. Lipson, Nature, 431, 1081 (2004).

    Article  CAS  Google Scholar 

  4. O. Boyraz and B. Jalali, Opt. Express, 12, 5269 (2004).

    Article  CAS  Google Scholar 

  5. H. Rong, A. Liu, R. Jones, O. Cohen, D. Hak, R. Nicolaescu, A. Fang and M. Paniccia, Nature, 433, 292 (2005).

    Article  CAS  Google Scholar 

  6. L. T. Canham, Appl. Phys. Lett., 57(10), 1046 (1990).

    Article  CAS  Google Scholar 

  7. Z. H. Lu, D. J. Lockwood and J. M. Baribeau, Nature, 378, 258 (1995).

    Article  CAS  Google Scholar 

  8. K. D. Hirschman, L. Tsybeskov, S. P. Duttagupta and P. M. Fauchet, Nature, 384, 338 (1996).

    Article  CAS  Google Scholar 

  9. L. Pavesi, S. Gaponenko and L. Dal Negro, eds., Towards the First Silicon Laser, NATO Advanced Studies Institute, Series 11, vol. 93, Kluwer, Dordrecht, 2003.

    Google Scholar 

  10. L. Pavesi and D. J. Lockwood, eds., Silicon Photonics, Springer, Berlin, 2004.

    Google Scholar 

  11. J. C. Vial, A. Bsiesy, F. Gaspard, R. Hèrino, M. Ligeon, F. Muller, R. Romestain and R. M. Macfarlane, Phys. Rev. B., 45(24), 14171 (1992).

    Article  CAS  Google Scholar 

  12. B. Gelloz, T. Nakagawa and N. Koshida, Appl. Phys. Lett., 73(14), 2021 (1998).

    Article  CAS  Google Scholar 

  13. K. D. Hirschman, L. Tsybeskov, S. P. Duttagupta and P. M. Fauchet, Nature, 384, 338 (1996).

    Article  CAS  Google Scholar 

  14. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franzò and F. Priolo, Nature, 408, 440 (2000).

    Article  CAS  Google Scholar 

  15. L. Khriachtchev, M. Rasanen, S. Novikov and J. Sinkkonen, Appl. Phys. Lett., 79(9), 1249 (2001).

    Article  CAS  Google Scholar 

  16. L. Dal Negro, M. Cazzanelli, L. Pavesi, S. Ossicini, D. Pacifici, G. Franzò, F. Priolo and F. Iacona, Appl. Phys. Lett., 82(26), 4636 (2003).

    Article  CAS  Google Scholar 

  17. J. Ruan, P. M. Fauchet, L. Dal Negro, M. Cazzanelli and L. Pavesi, Appl. Phys. Lett., 83(26), 5479 (2003).

    Article  CAS  Google Scholar 

  18. L. Dal Negro, M. Cazzanelli, B. Danese, L. Pavesi, F. Iacona, G. Franzò and F. Priolo, J. Appl. Phys., 96(10), 5747 (2004).

    Article  CAS  Google Scholar 

  19. M. Cazzanelli, D. Kovalev, L. Dal Negro, Z. Gaurro and L. Pavesi, Phys. Rev. Lett., 93(20), 207402 (2004).

    Article  CAS  Google Scholar 

  20. A. J. Kenyon, P. F. Trwoga, M. Federighi and C. W. Pitt, J. Phys. Condens. Matter, 6, L319 (1994).

    Article  Google Scholar 

  21. M. Fujii, M. Yoshida, Y. Kanzawa, S. Hayashi and K. Yamamoto, Appl. Phys. Lett., 71(9), 1198 (1997).

    Article  CAS  Google Scholar 

  22. G. Franzò, F. Iacona, V. Vinciguerra and F. Priolo, Mater. Sci. Eng. B, 69/70, 338 (1999).

    Google Scholar 

  23. P. G. Kik, M. L. Brongersma and A. Polman, Appl. Phys. Lett., 76(17), 2325 (2000).

    Article  CAS  Google Scholar 

  24. F. Priolo, G. Franzò, F. Iacona, D. Pacifici and V. Vinciguerra, Mater. Sci. Eng. B, 81(1–3), 9 (2001).

    Article  Google Scholar 

  25. J. H. Shin, M.-J. Kim, S.-Y. Seo and C. Lee, Appl. Phys. Lett., 72(9), 1092 (1998).

    Article  CAS  Google Scholar 

  26. M. V. Wolkin, J. Jorne, P. M. Fauchet, G. Allan and C. Delerue, Phys. Rev. Lett., 82(1), 197 (1999).

    Article  CAS  Google Scholar 

  27. A. J. Williamson, J. C. Grossman, R. Q. Hood, A. Puzder and G. Galli, Phys. Rev. Lett., 89(19), 196803 (2002).

    Article  CAS  Google Scholar 

  28. A. Puzder, A. J. Williamson, J. C. Grossman and G. Galli, J. Chem. Phys., 117(14), 6721 (2002).

    Article  CAS  Google Scholar 

  29. E. Degoli, G. Cantele, E. Luppi, R. Magri, D. Ninno, O. Bisi and S. Ossicini, Phys. Rev. B, 69(15), 155411 (2004).

    Article  CAS  Google Scholar 

  30. N. M. Park, C. J. Choi, T. Y. Seong and S. J. Park, Phys. Rev. Lett., 86(7), 1355 (2001).

    Article  CAS  Google Scholar 

  31. L. Dal Negro, J. H. Yi, V. Nguyen, Y. Yi, J. Michel and L. C. Kimerling, Appl. Phys. Lett., 86, 261905 (2005).

    Article  CAS  Google Scholar 

  32. T. Y. Kim, N. M. Park, K. H. Kim, G. Y. Sung, Y. W. Ok, T. Y. Seong and C. J. Choi, Appl. Phys. Lett., 85(22), 5355 (2004).

    Article  CAS  Google Scholar 

  33. K. S. Cho, N. M. Park, T. Y. Kim, K. H. Kim, G. Y. Sung and J. H. Shin, Appl. Phys. Lett., 86, 071909 (2005).

    Article  CAS  Google Scholar 

  34. L. A. Nesbit, Appl. Phys. Lett., 46(1), 38 (1985).

    Article  CAS  Google Scholar 

  35. T. Shimizu-Iwayama, K. Fujita, S. Nakao, K. Saitoh, T. Fujita and N. Itoh, J. Appl. Phys., 75(12), 7779 (1993).

    Article  Google Scholar 

  36. K. S. Min, K. V. Shcheglov, C. M. Yang, H. A. Atwater, M. L. Brongersma and A. Polman, Appl. Phys. Lett., 69(14), 2033 (1996).

    Article  CAS  Google Scholar 

  37. F. Iacona, G. Franzò and C. Spinella, J. Appl. Phys., 87(3), 1295 (2000).

    Article  CAS  Google Scholar 

  38. S. Hayashi, T. Nagareda, Y. Kzawa and K. Yamamoto, Jpn. J. Appl. Phys., 32, 3840 (1993).

    Article  CAS  Google Scholar 

  39. U. Kahler and H. Hoffmeister, Opt. Mater., 17(1–2), 83 (2001).

    Article  CAS  Google Scholar 

  40. J. Valenta, P. Janda, K. Dohnalová, D. Niž ansky, F. Vácha and J. Linnros, Opt. Mater., 27(5), 1046 (2005).

    Article  CAS  Google Scholar 

  41. G. Ledoux, J. Gong, F. Huisken, O. Guillois and C. Reynaud, Appl. Phys. Lett., 80(25), 4834 (2002).

    Article  CAS  Google Scholar 

  42. S. Botti, R. Coppola, F. Gourbilleau and R. Rizk, J. Appl. Phys., 88(6), 3396 (2000).

    Article  CAS  Google Scholar 

  43. J. P. Wilcoxon, G. A. Samara and P. N. Provencio, Phys. Rev. B, 60(4), 2704 (1999).

    Article  CAS  Google Scholar 

  44. L. Tsybeskov, K. D. Hirschman, S. P. Duttagupta, M. Zacharias, P. M. Fauchet, J. P. McCaffrey and D. J. Lockwood, Appl. Phys. Lett., 72(1), 43 (1998).

    Article  CAS  Google Scholar 

  45. M. Zacharias, J. Heitmann, R. Scholz, U. Kahler, M. Schmidt and J. Bläsing, Appl. Phys. Lett., 80(4), 661 (2002).

    Article  CAS  Google Scholar 

  46. D. A. Porter and K. E. Easterling, Phase Transformations in Metals and Alloys, 2nd Edition, Chapman and Hall, London, 1992.

    Google Scholar 

  47. J. W. Christian, The Theory of Transformations in Metals and Alloys Parts I and II, 3rd Edition, Elsevier, Oxford, 2002.

    Google Scholar 

  48. D. J. Olego and H. Baumgart, J. Appl. Phys., 63(8), 2669 (1988).

    Article  CAS  Google Scholar 

  49. I. H. Campbell and P. M. Fauchet, Solid State Commun., 58(10), 739 (1986).

    Article  CAS  Google Scholar 

  50. Y. Kanemitsu, H. Uto, Y. Masumoto, T. Matsumoto, T. Futagi and H. Mimura, Phys. Rev. B., 48(4), 2827 (1993).

    Article  CAS  Google Scholar 

  51. P. Mishra and K. P. Jain, Phys. Rev. B., 64(7), 073304 (2001).

    Article  CAS  Google Scholar 

  52. E. W. Draeger, J. C. Grossman, A. J. Williamson and G. Galli, Phys. Rev. Lett., 90(16), 167402 (2003).

    Article  CAS  Google Scholar 

  53. G. Ledoux, O. Guillois, D. Porterat, C. Reynaud, F. Huisken, B. Kohn and V. Paillard, Phys. Rev. B, 62(23), 15942 (2000).

    Article  CAS  Google Scholar 

  54. G. Franzò, F. Iacona, C. Spinella, S. Cammarata and M. Grazia Gimaldi, Mater. Sci. Eng. B, 69–70, 454 (2000).

    Article  Google Scholar 

  55. J. Linnros, N. Lalic, A. Galeckas and V. Grivickas, J. Appl. Phys., 86(11), 6128 (1999).

    Article  CAS  Google Scholar 

  56. F. Priolo, G. Franzò, D. Pacifici, V. Vinciguerra, F. Iacona and A. Irrera, J. Appl. Phys., 89(1), 264 (2001).

    Article  CAS  Google Scholar 

  57. I. Sychugov, R. Juhasz, A. Galeckas, J. Valenta and J. Linnros, Opt. Mater., 27(5), 973 (2005).

    Article  CAS  Google Scholar 

  58. D. Kovalev, H. Heckler, G. Polisski and F. Koch, Phys. Status Solidi, 215, 871 (1999).

    Article  CAS  Google Scholar 

  59. J. H. Shin, S.-Y. Seo, S. Kim and S. G. Bishop, Appl. Phys. Lett., 76(15), 1999 (2000).

    Article  CAS  Google Scholar 

  60. J. Lee, J. H. Shin and N. Park, J. Lightwave Technol., 23(1), 19 (2005).

    Article  CAS  Google Scholar 

  61. G. Franzò, A. Irrera, E. C. Moreira, M. Miritello, F. Iacona, D. Sanfilippo, G. Di Stefano, P. G. Fallica and F. Priolo, Appl. Phys. A, 74(1), 1 (2002).

    Article  Google Scholar 

  62. J. H. Shin, K.-S. Cho, J.-H. Jhe, G. Y. Sung, B.-H. Kim and S. J. Park, Proc. SPIE, 31, 5359 (2004).

    Google Scholar 

  63. G. Franzò, S. Boninelli, D. Pacifici, F. Priolo, F. Iacona and C. Bongiorno, Appl. Phys. Lett., 82(2), 3871 (2003).

    Article  CAS  Google Scholar 

  64. M. Stolfi, L. Dal Negro, J. Michel, X. Duan, J. LeBlanc, J. Haavisto and L. C. Kimerling, Mater. Res. Soc. Symp. Proc. 832, F11.8 (2005).

    Google Scholar 

  65. L. Dal Negro, M. Stolfi, J. Michel, J. LeBlanc, J. Haavisto, L.C. Kimerling, Proceedings of the 2nd IEEE International Conference on Group IV Photonics (IEEE Cat. No. 05EX1053), 87 (2005).

    Google Scholar 

  66. L. Dal Negro, J. H. Yi, M. Hiltunen, J. Michel, L. C. Kimerling, S. Hamel, A. J. Williamson, G. Galli, T.-W. F. Chang, V. Sukhovatkin and E. H. Sargent, J. Exp. Nanosci., 1(1), 29–50 (2006).

    Article  CAS  Google Scholar 

  67. L. Dal Negro, J. H. Yi, J. Michel, L. C. Kimerling, T.-W. F. Chang, V. Sukhovatkin and E. H. Sargent, Appl. Phys. Lett., 88, 233109 (2006).

    Article  CAS  Google Scholar 

  68. T.-W. F. Chang, A. Maria, P. W. Cyr, V. Sukhovatkin, L. Levina and E. H. Sargent, Synth. Met. 148, 257 (2005).

    Article  CAS  Google Scholar 

  69. J. C. de Mello, H. F. Wittmann and R. H. Friend, Adv. Mater., 9, 230 (1997).

    Article  Google Scholar 

  70. The Qbox71 code was used for the structural relaxation and the ABINIT72 code was used to evaluate gaps and oscillator strength. All calculations use norm conserving, Troullier-Martins pseudopotentials for the core electrons and a plane-wave basis with a 70 Ry cutoff.

    Google Scholar 

  71. F. Gygi, Lawrence Livermore National Laboratory, Internal communication

    Google Scholar 

  72. The ABINIT code is a common project of the Université Catholique de Louvain, Corning Incorporated, and other contributors (URL http://www.abinit.org)

  73. D. M. Ceperley and B. J. Alder, Phys. Rev. Lett., 45(7), 566 (1980).

    Article  CAS  Google Scholar 

  74. L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson and G. Galli, Appl. Phys. Lett., 88, 183103 (2006).

    Article  CAS  Google Scholar 

  75. M. L. Brongersma, P. G. Kik, A. Polman, K. S. Min and H.A. Atwater, Appl. Phys. Lett., 76(3), 351 (2000).

    Article  CAS  Google Scholar 

  76. S. V. Deshpande, E. Gulari, S. W. Brown and S. C. Rand, J. Appl. Phys., 77(12), 6534 (1995).

    Article  CAS  Google Scholar 

  77. F. Gourbilleau, P. Choppinet, C. Dufour, M. Levalois, R. Madelon, C. Sada, G. Battaglin and R. Rizk, Phys. E, 16(3), 331 (2003).

    Article  CAS  Google Scholar 

  78. T. Miyakawa and D. L. Dexter, Phys. Rev. B, 1(7), 2961 (1970).

    Article  Google Scholar 

  79. L. Dal Negro, J. H. Yi, J. Michel, L. C. Kimerling, S. Hamel, A. Williamson and G. Galli, IEEE J. Select. Topics Quantum Electron., 12(6), 1628 (2006)

    Article  CAS  Google Scholar 

  80. E. H. Sargent, Adv. Mater., 17(5), 515 (2005).

    Article  CAS  Google Scholar 

  81. S. A. McDonald, P. W. Cyr, L. Levina and E. H. Sargent, Nat. Mater., 4(2), 138 (2005).

    Article  CAS  Google Scholar 

  82. L. Bakueva, S. Musikhin, M. A. Hines, T.-W. Chang, M. Tzolov, G. D. Scholes and E. H. Sargent, Appl. Phys. Lett., 82(17), 2895 (2003).

    Article  CAS  Google Scholar 

  83. E. J. D. Klem, L. Levina and E. H. Sargent, Appl. Phys. Lett., 87(5), 053101 (2005).

    Article  CAS  Google Scholar 

  84. V. Sukhovatkin, S. Musikhin, I. Gorelikov, S. Cauchi, L. Bakueva, E. Kumacheva and E. H. Sargent, Opt. Lett., 30(2), 171 (2005).

    Article  CAS  Google Scholar 

  85. M. Cazzanelli, D. Navarro-Urriós, F. Riboli, N. Daldosso, L. Pavesi, J. Heitmann, L. X. Yi, R. Scholz, M. Zacharias and U. Gösele, J. Appl. Phys., 96(6), 3164 (2004).

    Article  CAS  Google Scholar 

  86. C. Manolatou, S. G. Johnson, S. Fan, P. R. Villeneuve, H. A. Haus and J. D. Joannopoulos, J. Lightwave Technol., 17(9), 1682 (1999).

    Article  Google Scholar 

  87. L. H. Slooff, P. G. Kik, A. Tip and A. Polman, J. Lightwave Technol., 19(11), 1740 (2001).

    Article  Google Scholar 

  88. D. R. Lim, B. E. Little, K. K. Lee, M. Morse, H. H. Fujimoto, H. A. Haus and L. C. Kimerling, Proc. SPIE, 3847, 65 (1999).

    Article  CAS  Google Scholar 

  89. L. Yang, D. K. Armani and K. J. Vahala, Appl. Phys. Lett., 83(5), 825 (2003).

    Article  CAS  Google Scholar 

  90. N. Daldosso, D. Navarro-Urrios, M. Melchiorri, L. Pavesi, F. Gorbilleau, M. Carrada, R. Rizk, C. Garcia, P. Pellegrino, B. Garrido and L. Cognolato, Appl. Phys. Lett., 86, 261103 (2005).

    Article  CAS  Google Scholar 

  91. H.-S. Han, S.-Y. Seo and J. H. Shin, Appl. Phys. Lett., 79(27), 4568 (2001).

    Article  CAS  Google Scholar 

  92. J. De La Torre, A. Souifi, A. Poncet, C. Busseret, M. Lemiti, G. Bremond, G. Guillot, O. Gonzalez, B. Garrido, J. R. Morante and C. Bonafos, Phys. E, 16(3–4), 326 (2003).

    Article  CAS  Google Scholar 

  93. A. Irrera, D. Pacifici, M. Miritello, G. Franzò, F. Priolo, F. Iacona, G. Sanfilippo, G. Di Stefano and P. G. Fallica, Appl. Phys. Lett., 81(10), 1866 (2002).

    Article  CAS  Google Scholar 

  94. R. J. Walters, G. I. Bourianoff and H. A. Atwater, Nat. Mater., 4, 143 (2005).

    Article  CAS  Google Scholar 

  95. P. E. de Brito, C. A. A. Da Silva and N. H. Nazareno, Phys. Rev. B, 51(9), 6096 (1995).

    Article  Google Scholar 

  96. M. Dulea, M. Johansson and R. Riklund, Phys. Rev. B, 45(1), 105 (1992).

    Article  Google Scholar 

  97. F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli and F. Priolo, J. Appl. Phys., 95(7), 3723 (2004).

    Article  CAS  Google Scholar 

  98. E. Yablonovitch, Phys. Rev. Lett., 58(20), 2059 (1987).

    Article  CAS  Google Scholar 

  99. S. John, Phys. Rev. Lett., 58(23), 2486 (1987).

    Article  CAS  Google Scholar 

  100. J. D. Joannopoulos, P. R. Villeneuve and S. Fan, Nature (London), 386, 143 (1997).

    Article  CAS  Google Scholar 

  101. P. W. Anderson, Philos. Mag., 52, 505 (1985).

    Article  CAS  Google Scholar 

  102. S. John, Phys. Rev. Lett., 53(22), 2169 (1984).

    Article  Google Scholar 

  103. M. P. van Albada and A. Lagendijk, Phys. Rev. Lett., 55(24), 2692 (1985).

    Article  Google Scholar 

  104. D. S. Wiersma, P. Bartolini, A. Lagendijk and R. Righini, Nature (London), 390, 671 (1997).

    Article  CAS  Google Scholar 

  105. F. Nori and J. P. Rodriguez, Phys. Rev. B, 34(4), 2207 (1986).

    Article  Google Scholar 

  106. R. B. Capaz, B. Koiller and S. L. A. de Queiroz, Phys. Rev. B, 42(10), 6402 (1990).

    Article  Google Scholar 

  107. T. Fujiwara, M. Kohmoto and T. Kokihiro, Phys. Rev. B, 40(10), 7413 (1989).

    Article  Google Scholar 

  108. C. M. Soukoulis and E. N. Economou, Phys. Rev. Lett., 48(15), 1043 (1982).

    Article  CAS  Google Scholar 

  109. M. Kohmoto, B. Southerland and C. Tang, Phys. Rev. B, 35(3), 1020 (1987).

    Article  Google Scholar 

  110. E. Maciá, Phys. Rev. B, 60(14), 10032 (1999).

    Article  Google Scholar 

  111. Z. M. Cheng, R. Savit and R. Merlin, Phys. Rev. B, 37(9), 4375 (1988).

    Article  Google Scholar 

  112. M. Queffélec, Substitution Dynamical Systems-Spectral Analysis, Lecture Notes in Mathematics, vol. 1294, Springer, Berlin, 1987.

    Google Scholar 

  113. F. Axel, J. P. Allouche, M. Kleman, M. Mendès-France and J. Peyrière, J. Phys., (Paris), Colloq., 47, C3–C181 (1986).

    Article  Google Scholar 

  114. N.-H. Liu, Phys. Rev. B, 55(6), 3543 (1997).

    Article  CAS  Google Scholar 

  115. L. Dal Negro, M. Stolfi, Y. Yi, J. Michel, X. Duan, L. C. Kimerling, J. LeBlanc and J. Haavisto, Appl. Phys. Lett., 84(25), 5186 (2004).

    Article  CAS  Google Scholar 

Download references

Acknowledgments

This work was partially supported by: the MRSEC program of the National Science Foundation under Contract No. DMR 02–13282, by the Draper Laboratory Incorporated Subcontract No. DL-H-546257 and by Pirelli Laboratories. We also acknowledge Dr. X. Duan for TEM sample preparation and imaging.

Author information

Authors and Affiliations

  1. Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, MA, 02139-4307, USA

    L. C. Kimerling

  2. Department of Electrical and Computer Engineering, Boston University, Boston

    L. Dal Negro

  3. Massachusetts 02215 and Materials Science Division, Boston University, Boston, Massachusetts, 02215

    L. Dal Negro

Authors
  1. L. C. Kimerling
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. L. Dal Negro
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. Stolfi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J. H. Yi
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. J. Michel
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. X. Duan
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. E. H. Sargent
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. T.-W. F. Chang
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. V. Sukhovatkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  10. J. Haavisto
    View author publications

    You can also search for this author in PubMed Google Scholar

  11. J. LeBlanc
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. Department of Electrical & Electronic Engineering, Tokyo University of Agriculture and Technology, Tokyo, Japan

    Nobuyoshi Koshida

Rights and permissions

Reprints and permissions

Copyright information

© 2009 Springer Science+Business Media, LLC

About this chapter

Cite this chapter

Kimerling, L.C. et al. (2009). Si-Rich Dielectrics for Active Photonic Devices. In: Koshida, N. (eds) Device Applications of Silicon Nanocrystals and Nanostructures. Nanostructure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-78689-6_1

Download citation

Publish with us

Policies and ethics

Search

Navigation