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Hydrogen Concentration, Bonding Configuration and Electron Emission Properties of Polycrystalline Diamond Films: From Micro- to Nanometric Grain Size

  • Sh. Michaelson
  • O. Ternyak
  • R. Akhvlediani
  • A. Hoffman
Chapter
Part of the Lecture Notes in Nanoscale Science and Technology book series (LNNST, volume 5)

Carbon science and technology has developed extensively in the last few decades due to discoveries of various polycrystalline and nanocrystalline diamond film deposition methods, synthesis of nanotubes, fullerenes and carbon fibers, etc. Nanocrystalline diamond films represent a new remarkable material that attracts a lot of attention of the scientific world due to its promising potential in many possible applications, such as tribology [1, 2], field emission [3, 4], electrochemistry [5, 6], protective optical windows [7, 8] as well as its unique ability to incorporate n-type dopants [9] compared to polycrystalline and single crystal diamond.

Keywords

Chemical Vapour Deposition Hydrogen Concentration Diamond Film Diamond Surface Elastic Recoil Detection Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    S.Y. Luo, J.K. Kuo, B. Yeh, J.C. Sung, C.W. Dai, T.J. Tsai, Mate. Chem. Phys. 2001;72(2): 133–135.CrossRefGoogle Scholar
  2. 2.
    L.Y. Huang, K.W. Xu, J. Lu, B. Guelorget, Surf. Coat. Technol. 2002;154(2–3):232–236.CrossRefGoogle Scholar
  3. 3.
    N. Jiang, K. Sugimoto, K. Nishimura, Y. Shintani, A. Hiraki, J. Cryst. Growth 2002;242 (3–4):362–366.CrossRefGoogle Scholar
  4. 4.
    K.H. Wu, X.R. Wang, S. Liu, E.G. Wang, J. Appl. Phys. 2001;90(9):4810–4814.CrossRefGoogle Scholar
  5. 5.
    N.G. Ferreira, L.L.G. Silva, E.J. Corat, Diamond Relat. Mater. 2002;11(3–6):657–661.CrossRefGoogle Scholar
  6. 6.
    Q.Y. Chen, D.M. Gruen, A.R. Krauss, T.D. Corrigan, M. Witek, G.M. Swain, J. Electrochem. Soc. 2001;148(1):E44–E51.CrossRefGoogle Scholar
  7. 7.
    J.Q. Li, D.Y. He, W.T. Guo, J.H. Zhang, Y.N. Sun, Q.S. Lei, X. Gao, Int. J. Modern Phys. B 2002. 16(6–7):1013–1017.Google Scholar
  8. 8.
    W.B. Yang, F.X. Lu, Z.X. Cao, J. Appl. Phys. 2002;91(12):10068–10073.CrossRefGoogle Scholar
  9. 9.
    S. Bhattacharyya, O. Auciello, J. Birrell, J.A. Carlisle, L.A. Curtiss, A.N. Goyette, D.M. Gruen, A.R. Krauss, J. Schlueter, A. Sumant, P. Zapol, Appl. Phys. Lett. 2001;79(10): 1441–1443.CrossRefGoogle Scholar
  10. 10.
    D. M. Gruen, Ann. Rev. Mater. Sci. 1999;29:211CrossRefGoogle Scholar
  11. 11.
    Y. Lifshitz, Th. Kohler, Th. Frauenheim, I. Guzmann, A. Hoffman, R. Q. Zhang, X. T. Zhou, S. T. Lee, Science 2002;297:1531CrossRefGoogle Scholar
  12. 12.
    J. B. Cui, J. Ristein, L. Ley, Phys. Rev. Lett. 1998;81:429.CrossRefGoogle Scholar
  13. 13.
    I. L. Krainsky, V. M. Asnin, G. T. Mearini, J. A. Dayton, Phys. Rev. B. 1996;53:R7650.CrossRefGoogle Scholar
  14. 14.
    J. Ristein, F. Maier, M. Riedel, M. Stammer, L. Ley, Diamond Relat. Mater 2001;10:416.CrossRefGoogle Scholar
  15. 15.
    O. Ternyak, A. Cimmino, S. Prawer, A. Hoffman, Diamond Relat. Mater. 2005;14:272.CrossRefGoogle Scholar
  16. 16.
    O. Ternyak, Sh. Michaelson, R. Akhvlediani, A. Hoffman, Diamond Relat. Mater. 2006;15:850.CrossRefGoogle Scholar
  17. 17.
    W. Zhu, G.P. Kochanski, S. Jin, Science 1998;282:1471.CrossRefGoogle Scholar
  18. 18.
    P. Ascarelli, E. Cappelli, F. Pinzari, M.C. Rossi, S. Salvatori, P.G. Merli, A. Migliori, J. Appl. Phys. 2001;89:689.CrossRefGoogle Scholar
  19. 19.
    Sh. Michaelson, O. Ternyak, Y. Lifshitz, A. Hoffman, Appl. Phys. Lett. 2007;90:061918CrossRefGoogle Scholar
  20. 20.
    Sh. Michaelson, Y. Lifshitz, O. Ternyak, A. Hoffman, Appl. Phys. Lett. 2006;89:131918CrossRefGoogle Scholar
  21. 21.
    P. Reichart, G. Datzmann, A. Hauptner, R. Hertenberger, C. Wild, G. Dollingeer, Science 2004;306:1537.CrossRefGoogle Scholar
  22. 22.
    M. Benlahsen, B. Racine, K. Zellama, G. Turban, J. Non-Crystalline Sol. 2001;47:283, 47.Google Scholar
  23. 23.
    B. Racine, M. Benlahsen, K. Zellama, P. Goudeau, M. Zarrabian, G. Turban, Appl. Phys. Lett. 1998;73:3226.CrossRefGoogle Scholar
  24. 24.
    J. Robertson, Philos. Mag. Lett. 1988;57:143.CrossRefGoogle Scholar
  25. 25.
    J. Robertson, Phys. Rev. Lett. 1992;68:220.CrossRefGoogle Scholar
  26. 26.
    W. Jacob, Thin Solid Films 1998;326:1.CrossRefGoogle Scholar
  27. 27.
    P. Reinke, W. Jacob, W. Moller, J. Appl. Phys. 1993;74:1354.CrossRefGoogle Scholar
  28. 28.
    A. Hoffman, A. Heiman, R. Akhvlediani, E. Lakin, E. Zolotoyabko, C. Cyterman, J. Appl. Phys. 2003. 94, 4589.CrossRefGoogle Scholar
  29. 29.
    E. Titus, D.S. Misra, A.K. Sikder, P.K. Tyagi, M.K. Singh, Abha Misra, N. Ali, G. Cabral, V.F. Neto, J. Gracio, Diam. Relat. Mat. 2005. 14, 476.Google Scholar
  30. 30.
    D.F. Talbot-Ponsonby, M.E. Newton, J.M. Baker, G.A. Scarsbrook, R.S. Sussmann, A.J. Whitehead, S. Pfenningen, Phys. Rev. B 1998. 57, 2264.CrossRefGoogle Scholar
  31. 31.
    R.D. Maclear, J.E. Butler, S.H. Connell, B.P. Doyle, I.Z. Machi, D.B. Rebuli, J.P.F. Sellschop, E. Sideras-Haddad, Diamond Relat. Mater. 1999. 8, 1615.CrossRefGoogle Scholar
  32. 32.
    Y. Lifshitz, X. M. Meng, S.T. Lee, R. Akhvlediani, A. Hoffman, Phys. Rev. Lett. 2004. (93) 056101Google Scholar
  33. 33.
    R. Akhvlediani, I. Lior, Sh. Michaelson, A. Hoffman, Diamond Relat. Matt. 2002;11:545CrossRefGoogle Scholar
  34. 34.
    D. Zhou, D. M. Gruen, L. C. Qin, T. G. McCauley, A. R. Krauss, J. Appl. Phys. 1998;84:1981.CrossRefGoogle Scholar
  35. 35.
    Sh. Michaelson, Y. Lifshitz, O. Ternyak, R. Akhvlediani, A. Hoffman, Diamond Relat. Mat. 2007. In pressGoogle Scholar
  36. 36.
    A. C. Ferrari, J. Robertson, Phys. Rev. B. 2001;63:R121405.CrossRefGoogle Scholar
  37. 37.
    A. C. Ferrari, J. Robertson, Phil. Trans. Royal Soc. A 2004;362:2477.CrossRefGoogle Scholar
  38. 38.
    A. C. Ferrari, S. E. Rodil, J. Robertson, Diamond Relat. Mat. 2003;12:905CrossRefGoogle Scholar
  39. 39.
    Wada, N., Gaczi, P.J., Solin, S.A., J. Non-Cryst. Solids 1980. 35–6 543Google Scholar
  40. 40.
    R.J. Nemanich, J.T. Glass, G. Lukovsky, R.E. Shreder, J. Vac. Sci. Technol. A 1988;6:1783Google Scholar
  41. 41.
    R. E. Shroder, R. J. Nemanich, J. T. Glass, Phys. Rev. B 1990;41:3738CrossRefGoogle Scholar
  42. 42.
    W.A Yarbrough, R. Messier, Science. Washington: Feb 9, 1990;247(4943):688 (9 pages)CrossRefGoogle Scholar
  43. 43.
    H. Kuzmany, R. Pfeiffer, N. Salk, B. Günther, Carbon 2004;42:911.CrossRefGoogle Scholar
  44. 44.
    Lopez-Rios, T., Mendoza, D., Garcia-Vidal, F.J., Sanchez-Dehesa, J., Pannetier, B. Phys. Rev. Lett., 1998;81:665CrossRefGoogle Scholar
  45. 45.
    Sh. Michaelson, A. Hoffman, Diamond Relat. Mater. 2006;15:486CrossRefGoogle Scholar
  46. 46.
    C.-F. Chen, C.-C. Wu, C.-L, Cheng, S.-Y. Sheu, H.-C. Chang, J. Chem. Phys. 2002;116:1211CrossRefGoogle Scholar
  47. 47.
    Y.-R. Chen, H.-C. Chang, C.-L, Cheng, C.-C. Wang, J.C. Jiang, J. Chem. Phys. 2003;119:10626CrossRefGoogle Scholar
  48. 48.
    C.-L, Cheng, C.-F. Chen, W.-C. Shaio, D.-S. Tsai, K.-H. Chen, Diamond Relat. Mater. 2005;14:1455CrossRefGoogle Scholar
  49. 49.
    H. Ibach, D.L Mills, Electron Energy Loss Spectroscopy and Surface Vibrations Academic, New York, 1982, p. 199Google Scholar
  50. 50.
    B.J. Waclawski, D.T. Pierce, N. Swanson, R.J. Celotta, J. Vac. Sci. Technol. 1982;21:368CrossRefGoogle Scholar
  51. 51.
    B.D. Thoms, J.E. Butler, Phys. Rev. B 1994;50:17450CrossRefGoogle Scholar
  52. 52.
    B.D. Thoms, J.E. Butler, Surface Science 1995;328:291CrossRefGoogle Scholar
  53. 53.
    B. Sun, X. Zhang, Q. Zhang, Z. Lin, Appl. Phys. Lett. 1993;62:31CrossRefGoogle Scholar
  54. 54.
    B. Sun, X. Zhang, Z. Lin, Phys. Rev. B 1993;47:9816CrossRefGoogle Scholar
  55. 55.
    S.T. Lee, G. Apai, Phys. Rev. B 1993;48(4):2684CrossRefGoogle Scholar
  56. 56.
    T. Aizawa, T. Ando, M. Kamo, Y. Sato, Phys. Rev. B, 1993;48(24):18348CrossRefGoogle Scholar
  57. 57.
    P.E. Pehrsson, T.W. Mercer, Surf. Sci. 2000;460:49CrossRefGoogle Scholar
  58. 58.
    P.E. Pehrsson, T.W. Mercer, Surf. Sci. 2000;460:74CrossRefGoogle Scholar
  59. 59.
    J. Kinsky, R. Graupner, M. Stammler, L. Ley, Diam. Relat. Mat. 2002;11:365CrossRefGoogle Scholar
  60. 60.
    K. Okada, T.Aizawa, R. Souda, S. Komatsu, S. Matsumoto, Diam. Relat. Mat. 2001;10:1991CrossRefGoogle Scholar
  61. 61.
    T. Aizawa, T. Ando, K. Yamamoto, M. Kamo, Y. Sato, Diam. Relat. Mat. 1995;4:600CrossRefGoogle Scholar
  62. 62.
    A. Lafosse, D.T. Billy, J.P. Guillotin, Y. Le Coat, R. Azria, A. Laikhtman, A. Hoffman, Phys. Rev. B 2003;68(23):235421CrossRefGoogle Scholar
  63. 63.
    A. Laikhtman, A. Lafosse, Y. Le Coat, R. Azria, A. Hoffman, J. Chem Phys. 2003;119:1794CrossRefGoogle Scholar
  64. 64.
    A. Laikhtman, A. Lafosse, Y. Le Coat, R. Azria, A. Hoffman, Surf. Sci. 2004;551:99CrossRefGoogle Scholar
  65. 65.
    A. Lafosse, D. Caceres, M. Bertin, A. Hoffman, R. Azria, Surf. Sci. 2005;587:134CrossRefGoogle Scholar
  66. 66.
    M. Bertin, A. Domaracka, D. Pliszka, A. Laffose, R. Azria, Surf. Sci. 2006;600:847CrossRefGoogle Scholar
  67. 67.
    A. Lafosse, A. Hoffman, M. Bertin, D. Teillet-Billy, R. Azria, Phys. Rev. B 2006;73:195308CrossRefGoogle Scholar
  68. 68.
    Sh. Michaelson, A. Hoffman, Diamond Relat. Mater. 2005;14:470CrossRefGoogle Scholar
  69. 69.
    Sh. Michaelson, A. Hoffman, Diamond Relat. Mater. 2006;15:486CrossRefGoogle Scholar
  70. 70.
    H. Okuyama, S. Thachepan, T. Argua, T. Ando, M. Nishijima Chem. Phys. Lett. 2003. 381 535CrossRefGoogle Scholar
  71. 71.
    J. Biener, A. Schenk, B. Winter, C. Lutterloh, U.A. Schubert, J. Küppers, Surf. Sci. Lett. 1993;291:L725CrossRefGoogle Scholar
  72. 72.
    J. Biener, A. Schenk, B. Winter, C. Lutterloh, U.A. Schubert, J. Küppers, Surface Science 1994. 228 307–309Google Scholar
  73. 73.
    A. Horn, J. Biener, A. Schenk, C. Lutterloh, J. Küppers, Surface Science 1995. 178 331–333Google Scholar
  74. 74.
    Sh. Michaelson, Y. Lifshitz, A. Hoffman, Appl. Phys. Lett. 2006. 89 223112CrossRefGoogle Scholar
  75. 75.
    Sh. Michaelson, Y. Lifshitz, A. Hoffman, Diamond Relat. Mat. (2007, available on-line) In pressGoogle Scholar
  76. 76.
    J. Ristein, R.T. Stief, L. Ley, W. Beyer J. Appl. Phys. 1998;84(7):3836CrossRefGoogle Scholar
  77. 77.
    Th. Frauenheim, Th. Kohler, M. Sternberg, D. Porezag, M.R. Pederson, Thin Solid Films 1996. 272 314CrossRefGoogle Scholar
  78. 78.
    R. Kalish, Y. Lifshitz, K. Nugent, S. Prawer Appl. Phys. Lett. 1999;74(20):2936CrossRefGoogle Scholar
  79. 79.
    R. Kalish, in The Physics of Diamond Int. School of Physics Enrico Fermi, Vol. 135, edited by A. Paoletti and A. Tucciarone, IOS, Amsterdam, 1997, p. 373Google Scholar
  80. 80.
    M. Benlahsen, B. Racine, K. Zellama, G. Turban, J. Non-Cryst. Solids 2001;283:47CrossRefGoogle Scholar
  81. 81.
    Ch. Wild, P. Koidl Appl. Phys. Lett. 1987;51:1506CrossRefGoogle Scholar
  82. 82.
    J. K. Walters, D.M. Fox, T.M. Burke, O.D. Weedon, R.J. Newport, W.S. Howells, J. Chem. Phys. 1994;101:4288CrossRefGoogle Scholar
  83. 83.
    J. K. Walters, J.S. Rigden, R.J. Newport, S.F. Parker, W.S. Howells, Phys, Scr. T 1995;57:142CrossRefGoogle Scholar
  84. 84.
    M. Lejeune, M. Benlahsen, R. Bouzerar Appl. Phys. Lett. 2004;84:344CrossRefGoogle Scholar
  85. 85.
    M. Bertin, A. Lafosse, R. Azria, Sh. Michaelson, O. Ternyak, A. Hoffman, Appl. Phys. Lett. 2007;90:031914CrossRefGoogle Scholar
  86. 86.
    Sh. Michaelson, R. Akhvlediani, O. Ternyak, A. Hoffman, A. Breskin, R. Chechik, Diamond Relat. Mater. 2005;14:546.CrossRefGoogle Scholar
  87. 87.
    Sh. Michaelson, V. Richter, R. Kalish, A. Hoffman, E. Cheifetz, R. Akhvlediani, Thin Solid Films 2002;185:420–421Google Scholar
  88. 88.
    O. Ternyak, R. Akhvlediani, W.K. Wong, S.T. Lee, Y. Lifshitz, S. Daren, E. Cheifetz, A. Hoffman, J. Appl. Phys. 2005;98:123522CrossRefGoogle Scholar
  89. 89.
    A. Shih, J. Yater, P. Pehrsson, J. Butler, C. Hor, R. Abrams, J. Appl. Phys. 1997;82(4):860CrossRefGoogle Scholar
  90. 90.
    Y.D. Kim, W. Choi, H. Wakimoto, S. Usami, H. Tomokage, T. Ando, Diamond Relat. Mater. 2000;9:1096CrossRefGoogle Scholar
  91. 91.
    Y. Iseri, M. Honda, Y.D. Kim, T. Ando, W. Choi, H. Tomokage, J. Phys.: Condens. Matter 2004;16:S171CrossRefGoogle Scholar
  92. 92.
    F. Lacher, C. Wild, D. Behr, P. Koidl, Diamond Relat. Mater. 1997;6:1111CrossRefGoogle Scholar
  93. 93.
    A.V. Karabutov, V.D. Frolov, S.M. Pimenov, V.I. Konov, Diamond Relat. Mater. 1999;8:763.CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  • Sh. Michaelson
  • O. Ternyak
  • R. Akhvlediani
  • A. Hoffman
    • 1
  1. 1.Schulich Faculty of ChemistryTechnion – Israel Institute of TechnologyHaifa 32000Israel

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