Fabrication of Oxide Nanoparticles by Ion Implantation and Thermal Oxidation

  • H. AmekuraEmail author
  • N. Kishimoto
Part of the Lecture Notes in Nanoscale Science and Technology book series (LNNST, volume 5)


Fabrication of oxide nanoparticles (NPs) in transparent insulators by metal ion implantation and subsequent thermal oxidation (II&TO) is reviewed. After a short historical review of the II&TO method, fundamental issues concerning two important processes in the II&TO method, i.e., (i) formation of metal NPs by ion implantation and (ii) thermal oxidation of the metal NPs, are described. Then the highlights of this chapter, i.e., the formation of oxide NPs by the II&TO method, are reviewed. Oxide NP systems of NiO, CuO, and ZnO have been formed by the conventional II&TO method, i.e., the II&TO method using atmospheric pressure of oxygen gas. Each of the NP system shows different characteristics. While NiO, CuO (and Cu2O) NP systems show the oxide formation with little redistribution of the depth profiles, i.e., the oxide NPs are retained inside the SiO2 substrate, ZnO NPs are formed on the surface of the SiO2 substrate after prominent depth redistribution. Furthermore, recent developments in the II&TO method, i.e., the second generation of the II&TO method, are shown. ZnO NPs embedded in SiO2 substrate are formed by low temperature and long-term oxidation. Cu2O NPs, which are not most stable under atmospheric pressure of oxygen, are formed by two-step annealing. Consequently, selective formation of CuO and Cu2O NPs is possible using the conventional II&TO and the two-step II&TO method, respectively. Finally, some remaining aspects of the oxide NP formation by the II&TO method are discussed.


Surface Plasmon Resonance Rutherford Backscattering Spectrometry Surface Plasmon Resonance Peak Gibbs Energy Change Surface Plasmon Resonance Absorption 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The authors thank Drs. N. Umeda, Y. Takeda, K. Kono, M. Yoshitake, Y. Sakuma, M. Ohnuma, S. Hishita, M. Tanaka, H.-S. H. Boldyryeva (NIMS), Dr. Y. Katsya (Spring-8 service Co. Ltd.), Wang, O.A. Plaksin (SSC RF, A.I. Leypunsky Institute of Physics. & Power Engineering, Russia), Profs. Ch. Buchal and S. Mantl (Forschungszenturum Juelich, Germany) for collaborations. They appreciate the staffs of BL15XU, NIMS and of Spring-8 for their help at the beam line. The high temperature XRD measurements were performed under the approval of NIMS Beamline station (Proposal No. 2007A4501 and 2007B4502). Also the authors thank Profs. X.T. Zu (University of Electronic Science & Technology, China), Y.C. Liu (Northeast Normal University China), D. Ila (Alabama A&M University, USA), Dr. C. Marques (Instituto Tecnolo’gico e Nuclear, Portugal), Dr. P.K. Kuiri (Institute of Physics, India), Prof. G. Mattei (University of Padova, Italy), Dr. M.A. Tagliente (Centro Ricerche Brindisi, Italy), and Prof. Y. Saito (University of Yamanashi, Japan) for exchange of information.

Some parts of this study were financially supported by JSPS-Kakenhi (No. 18510102), the Budget for Nuclear Research of the MEXT based on the screening and counseling by the Atomic Energy Commission, Futaba Electronics Memorials Foundation, and Nippon Sheet Glass Foundation for Materials Science and Engineering.


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Authors and Affiliations

  1. 1.National Institute for Materials Science (NIMS)Japan
  2. 2.Quantum Beam Center, National Institute for Materials Science (NIMS)Japan

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