Abstract
This paper presents the production and testing of an ortho-planar one-way micro-valve. The main advantages of such valves are that they are very compact and can be made from a single flat piece of material. A previous paper presents and discusses a micro-valve assembly based on a spider spring. The present paper focuses on the valve assembly process and the valve performance.. Several prototypes with a bore of 0.2 mm have been built using two manufacturing techniques (μEDM and stereo-lithography) and tested for pressures up to 7 bars.
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D.J. Laser and J.G. Santiago, (2004). A review of micropumps. JMM, 14, R35–R64.
B. Li, Q. Chen, D.G. Lee, J. Woolman and G.P. Carman, (2005). Development of large flow rate, robust, passive micro check valves for compact piezoelectrically actuated pumps. SAA, 117, 325–330.
N.T. Nguyen, T.Q. Truong, K.K. Wong, S.S. Ho and C.L.N. Low, (2004). Micro check valves for integration into polymeric microfluidic devices. JMM, 14, 69–75.
X. Yang, C. Grosjean, Y.C. Tai and C.M. Ho, (1998). A mems thermopneumatic silicone rubber membrane valve. SAA, 64, 101–108.
Check-All Valve Manufacturing Company, West Des Moines, Iowa, USA (October 2, 2007); http://www.checkall.com
Clippard Minimatic, Cincinnati, Ohio, USA (October 2, 2007); http://www.clippard.com
Command Controls Corp., Elgin, Illinois, USA (October 2, 2007); http://www.commandcontrols.com
Deltrol fluid products, Bellwood, Illinois, USA (October 2, 2007); http://www.deltrolfluid.com
Halkey-Roberts, St. Petersburg, Florida, USA (October 2, 2007); http://www.halkeyroberts.com
The Lee Company, Westbrook, Connecticut, USA (October 2, 2007); http://www.theleeco.com
O’Keefe Controls Co., Trumbull, Connecticut, USA (October 2, 2007); http://www.okcc.com
Sterling Hydraulics Ltd., Crewkerne, Somerset, UK (October 2, 2007); http://www.sterling-hydraulics.co.uk
Integrated Publishing, (October 2, 2007); http://www.tpub.com
O. Smal, B. Dehez, B. Raucent, M. De Voider, J. Peirs, D. Reynaerts, et al. (2006). Modelling and characterisation of an ortho-planar micro-valve. Precision Assembly Technologies for Mini and Micro Products, Springer, 2006, ed S. Ratchev, pp 375–326.
R. Feng and R.J. Farris, (2003). Influence of processing conditions on the thermal and mechanical properties of su8 negative photoresist coatings. JMM, 13, 80–88.
H. Lorenz, M. Despont, N. Fahrni, N. LaBianca, P. Renaud and P. Vettiger, (1997). Su-8: A low-cost negative resist for mems. JMM, 7, 121–124.
G. Boothroyd and P. Dewhurst, (1989) Product Design for Assembly, Boothroyd Dewhurst, Inc., pp 2–12,2–16
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© 2008 International Federation for Information Processing
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Smal, O., Raucent, B., Ceyssens, F., Puers, R., De Volder, M., Reynaerts, D. (2008). Design and Testing of an Ortho-Planar Micro-Valve. In: Ratchev, S., Koelemeijer, S. (eds) Micro-Assembly Technologies and Applications. IPAS 2008. IFIP — International Federation for Information Processing, vol 260. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-77405-3_7
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DOI: https://doi.org/10.1007/978-0-387-77405-3_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-77402-2
Online ISBN: 978-0-387-77405-3
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