Overview of Wafer-Level 3D ICs

  • Chuan Seng Tan
  • Ronald J. Gutmann
  • L. Rafael Reif
Part of the Integrated Circuits and Systems book series (ICIR)


Active Layer Device Layer Wafer Bonding Static Random Access Memory CMOS Inverter 


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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Chuan Seng Tan
    • 1
  • Ronald J. Gutmann
  • L. Rafael Reif
  1. 1.Nanyang Technological UniversitySingapore

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