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Electron Energy-Loss Spectrometers and Filters

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Transmission Electron Microscopy

Abstract

Electron energy-loss spectrometry (EELS) is the analysis of the energy distribution of electrons that have come through the specimen. These electrons may have lost no energy or may have suffered inelastic (usually electron-electron) collisions.

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The Instrument

  • Brydson, R 2001 Electron Energy-Loss Spectroscopy 2001 Bios (Royal Microsc. Soc.) Oxford UK. Good introductory text, similar in content and level to much of this chapter and the subsequent ones.

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  • Castaing, R. and Henry, L 1962 Filtrage Magnétique des Vitesses en Microscopie Electronique C. R. Acad. Sci. Paris B255 76–78. The original design for the mirror prism.

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  • Egerton, RF 2003 New Techniques in Electron Energy-Loss Spectroscopy Micron 34 127–139 A concise review of recent advances in instrumentation.

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  • Egerton, RF, Yang, YY and Cheng, SY 1993 Characterization and Use of the Gatan 666 Parallel-Recording Electron Energy-Loss Spectrometer Ultramicrosc. 48 239–250.

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  • Hillier, J. and Baker, RF 1944 Microanalysis by Means of Electrons J. Appl. Phys. 15 663–675. History – it’s amazing to read that AEM was essentially all conceived more than 60 years ago.

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  • Metherell, AJF 1971 Energy Analysing and Energy Selecting Electron Microscopes Adv. Opt. Elect. Microsc. 4 263–361 Eds. R Barer and VE Cosslett Academic Press New York. Still the best review of spectrometers.

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  • Uhlemann, S and Rose, H 1996 Acceptance of Imaging Energy Filters Ultramicrosc. 63 161–167.

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Background Data

  • Ahn, CC Ed. 2004 Transmission Electron Energy Loss Spectrometry in Materials Science 2nd Ed. Wiley-VCH Weinheim Germany. Updated version of the Disko et al. text (below).

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  • Disko, MM, Ahn, CC and Fultz, B Eds. 1992 Transmission Electron Energy Loss Spectrometry in Materials Science and the EELS Atlas TMS Warrendale PA. Multi-author, practical text.

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  • Egerton, RF 1986 Electron Energy-Loss Spectroscopy in the Electron Plenum Press New York. The bible of EELS; required reading for all serious spectroscopists.

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  • Egerton, RF 1996 Electron Energy-Loss Spectroscopy in the Electron Microscope 2nd Ed. Plenum Press New York. Second edition of the EELS bible.

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Applications

  • Batson PE 2004 Electron Energy Loss Studies of Semiconductors in Transmission Electron Energy Loss Spectrometry in Materials Science 2nd Ed. 353–384 Ed. CC Ahn Wiley-VCH Weinheim Germany.

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  • Gloter, A, Douiri, A, Tencé, M and Colliex, C 2003 Improving Energy Resolution of EELS Spectra: an Alternative to the Monochromator Solution Ultramicrosc. 96 385–400.

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  • Hunt, JA and Williams, DB Electron Energy-Loss Spectrum Imaging Ultramicrosc. 38 47–73.

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  • Kimoto, K, Kothleitner, G, Grogger, W, Masui, Y and Hofer, F 2005 Advantages of a Monochromator for Bandgap Measurements Using Electron Energy-loss Spectroscopy Micron 36 185–189.

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The EELS Workshop Reports

  • The quadrennial EELS workshops (1990, 1994, 1998, 2002, and 2006) pioneered and often organized and edited by Krivanek are a rich source of papers by the leading researchers in the field describing cutting-edge aspects of EELS and related techniques. Often the proceedings are published separately and are divided between methodology/instrumentation and practice. The respective journals (either complete volumes or part thereof) and editors are listed below.

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  • Krivanek, OL Ed. 1991 Microsc. Microanal. Microstruct. 2 (# 2–3).

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  • Krivanek, OL Ed. 1995a Microsc. Microanal. Microstruct. 6 1.

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  • Krivanek, OL Ed. 1995b Ultramicrosc. 59 (# 1–4).

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  • Krivanek, OL Ed. 1999 Ultramicrosc. 78 (# 1–4).

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  • Krivanek, OL Ed. 1999 Micron 30 (#2) 101.

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  • Krivanek, OL Ed. 2003 Ultramicrosc. 96 (#2–4) 229.

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  • Krivanek, OL Ed. 2003 J. Microsc. 210 1.

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  • Browning, ND and Midgley, P Eds. 2006 Ultramicrosc. 106 (#11–12).

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  • Mayer, J Ed. 2006 Micron 37 375.

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Correspondence to David B. Williams .

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Williams, D.B., Carter, C.B. (2009). Electron Energy-Loss Spectrometers and Filters. In: Transmission Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-76501-3_37

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