Spatial Resolution and Minimum Detection

  • David B. Williams
  • C. Barry Carter


Often when you do X-ray analysis of thin foils you are seeking information that is close to the limits of spatial resolution. Before you carry out any such analysis you need to understand the various controlling factors and in this chapter we explain these. Minimizing your specimen thickness is perhaps the most critical aspect of obtaining the best spatial resolution, so we summarize the various ways you can measure your foil thickness at the analysis point, but the quality of the TEM-XEDS system is also important.


Thin Foil Specimen Thickness Foil Thickness Thin Specimen Beam Spreading 
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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.The University of Alabama in HuntsvilleHuntsvilleUSA
  2. 2.University of ConnecticutStorrsUSA

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