Spatial Resolution and Minimum Detection
Often when you do X-ray analysis of thin foils you are seeking information that is close to the limits of spatial resolution. Before you carry out any such analysis you need to understand the various controlling factors and in this chapter we explain these. Minimizing your specimen thickness is perhaps the most critical aspect of obtaining the best spatial resolution, so we summarize the various ways you can measure your foil thickness at the analysis point, but the quality of the TEM-XEDS system is also important.
KeywordsThin Foil Specimen Thickness Foil Thickness Thin Specimen Beam Spreading
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- Goldstein, JI, Williams, DB and Cliff, G 1986 Quantification of Energy Dispersive Spectra in Principles of Analytical Electron Microscopy 155–217 Eds. DC Joy, AD Romig Jr. and JI Goldstein, Plenum Press New York. Introduction to many of the concepts in this chapter and the preceding one.Google Scholar
- Jones IP 1992 Chemical Microanalysis Using Electron Beams Institute of Materials London. Redefined Goldstein et al. equation in SI units on p173.Google Scholar
- Joy, DC 1995 Monte Carlo Modeling for Electron Microscopy and Microanalysis Oxford University Press New York. The only textbook covering this essential topicGoogle Scholar
Thickness and Resolution
- Michael, JR, Williams, DB, Klein, CF and Ayer, R 1990 The Measurement and Calculation of the X-ray Spatial Resolution Obtained in the Analytical Electron Microscope J. Microsc. 160 41–53.Google Scholar
P/B, ζ, AND MMF
- Goldstein, JI, Costley, JL, Lorimer, G. and Reed, SJB 1977 Quantitative X-ray Microanalysis in the Electron Microscope SEM 1977 1 315–325 Ed. O Johari IITRI Chicago IL. Seminal paper.Google Scholar
- Lyman, CE, Goldstein, JI, Williams, DB, Ackland, DW, Von Harrach, S, Nicholls, AW and Statham, PJ 1994 High Performance X-ray Detection in a New Analytical Electron Microscope J. Microsc. 176 85–98. Description of what is still the best X-ray analysis instrument in the world.Google Scholar
- Lyman, CE and Michael, JR 1987 A Sensitivity Test for Energy-dispersive X-ray Spectrometry in the Analytical Electron Microscope in Analytical Electron Microscopy-1987 231–234, Ed. DC Joy, San Francisco Press San Francisco CA. Spatial resolution versus sensitivity limits.Google Scholar