Abstract
Often when you do X-ray analysis of thin foils you are seeking information that is close to the limits of spatial resolution. Before you carry out any such analysis you need to understand the various controlling factors and in this chapter we explain these. Minimizing your specimen thickness is perhaps the most critical aspect of obtaining the best spatial resolution, so we summarize the various ways you can measure your foil thickness at the analysis point, but the quality of the TEM-XEDS system is also important.
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Classics
Berriman, J, Bryan, R, Freeman, R and Leonard, KR 1984 Methods for Specimen Thickness Determination in Electron Microscopy Ultramicrosc. 13 351–364. Old, but still useful, review of thickness measurements in the TEM.
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Thickness and Resolution
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P/B, ζ, AND MMF
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Ziebold, TO 1967 Precision and Sensitivity in Electron Micro-probe Analysis Anal. Chem. 39 858–861. Just what it says!
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Williams, D.B., Carter, C.B. (2009). Spatial Resolution and Minimum Detection. In: Transmission Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-76501-3_36
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DOI: https://doi.org/10.1007/978-0-387-76501-3_36
Publisher Name: Springer, Boston, MA
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