Qualitative X-ray Analysis and Imaging

  • David B. Williams
  • C. Barry Carter


It is a waste of time to proceed with quantitative analysis of your XEDS spectrum or image without first carrying out qualitative analysis. Qualitative analysis requires that every peak in the spectrum be identified unambiguously, with statistical certainty, otherwise it should be ignored for both subsequent quantitative analysis and imaging. We emphasize this point because of the many opportunities for the misidentification of small peaks in the spectrum. In this chapter, we’ll deal initially with acquisition and identification of the elemental information in spectra and images. First, we will show you how to choose the best operating conditions for your particular AEM and XEDS system. Then we’ll explain the best way to obtain a spectrum for qualitative analysis. You have to acquire a spectrum with sufficient X-ray counts to allow you to draw the right conclusions with a given degree of confidence. There are a few simple rules to follow which allow you to do this.


Computer Display Coffee Break Artifact Peak Companion Text Subsequent Quantitative Analysis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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General References

  1. Goldstein, JI, Newbury, DE, Joy, DC, Lyman, CE, Echlin, P, Lifshin, E, Sawyer, L and Michael JR 2003 Scanning Electron Microscopy and X-ray Microanalysis 3rd Ed. p355 Kluwer Academic Press New York.Google Scholar

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.The University of Alabama in HuntsvilleHuntsvilleUSA
  2. 2.University of ConnecticutStorrsUSA

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