X-ray Spectra and Images

  • David B. Williams
  • C. Barry Carter


TheX-ray spectrumgenerated within your specimen consists of element-specific characteristic peaks with well-defined energies superimposed on a non-characteristic background. While the XEDS system is a remarkable piece of technology, we’ve already described its limited resolution and we will see in this chapter that it is also prone to creating small artifact peaks in the spectrum. Furthermore, the unavoidable presence of scattered electrons and X-rays within the AEM conspire to degrade the quality of the generated spectrum and increase the number of false peaks in the displayed spectrum. The AEM illumination system and specimen stage are rich sources of powerful radiation, not all of it by any means coming from the area of interest in your specimen. So you have to take precautions to ensure that the X-ray spectrum you collect comes predominantly from the area of the specimen that you want to analyze and we describe several tests you should perform to ensure that the XEDSTEM interface is optimized.


Thin Foil Data Cube Spectrum Image Escape Peak Standard File Format 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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General References

  1. Garrett-Reed, AJ and Bell, DC 2003 Energy-dispersive X-ray Analysis in the Electron Microscope Bios (Royal Microsc. Soc.) Oxford UK. Different descriptions of many of the issues discussed in this chapter.Google Scholar
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Specific References

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.The University of Alabama in HuntsvilleHuntsvilleUSA
  2. 2.University of ConnecticutStorrsUSA

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