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Density Functional Theory of High-k Dielectric Gate Stacks

  • Alexander A. Demkov
Part of the Nanostructure Science and Technology book series (NST)

Abstract

Density functional theory has proved to be a useful tool in device engineering, particularly at nanoscale and when novel materials are involved. In this chapter we briefly introduce the theoretical background necessary for understanding the modern theory of solid state and review recent theoretical results in the area of advanced gate stack materials engineering.

Keywords

Density Functional Theory Local Density Approximation Band Alignment Plane Wave Method Negative Bias Temperature Instability 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Notes

Acknowledgments

I wish to thank many colleagues for insightful discussions we have had over the years and my graduate students at the University of Texas, Onise Sharia, Xuhui Luo and Jaekwang Lee, for their hard work and help with the manuscript. This work in part is supported by the National Science Foundation under grants DMR-0548182 and DMR-0606464 and by the Office of Naval Research under grant N000 14-06-1-0362.

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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Alexander A. Demkov
    • 1
  1. 1.Department of PhysicsThe University of Texas at AustinAustinUSA

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