As technology scales, new subtle defects are seen during fabrication which can have significant impacts on yield and reliability of the shipped products. Resistive open and short are two such defects that cause timing or logic failures in the design. Such defects can cause gross or small delay defects depending on the size of their resistance. It is proven that the population of such defects increases as technology scales, thus increasing small delay defects.
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(2008). Screening Small Delay Defects. In: Nanometer Technology Designs High-Quality Delay Tests. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-75728-5_7
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