Indirect Nanofabrication

  • Zheng Cui


Silica Sphere Optical Lithography Nanosphere Lithography Mask Feature Thermal Oxidation Process 
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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Zheng Cui
    • 1
  1. 1.Council for the Central Laboratory of the Research Councils, Rutherford Appleton LaboratoryDIDCOTUK

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