Nanoscale Pattern Transfer

  • Zheng Cui


Etch Rate Radio Frequency Power Mask Pattern Pattern Transfer Plasma Sputtering 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media, LLC 2008

Authors and Affiliations

  • Zheng Cui
    • 1
  1. 1.Rutherford Appleton LaboratoryDidcotUK

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