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Electroless Fabrication of Nanostructures

  • T. Osaka
Chapter
Part of the Nanostructure Science and Technology book series (NST)

Abstract

This chapter reviews recent electroless deposition technologies mainly on the basis of the researches in the fields of interconnect materials for ultralarge-scale integration (ULSI) device and magnetic nanodot arrays for magnetic recording device, metal and metal oxide nanoparticles.

Keywords

Electroless Plating Electroless Deposition Plating Bath Lyotropic Liquid Crystal Iron Pentacarbonyl 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  1. 1.Department of Applied ChemistrySchool of Science and Engineering, Waseda University3-4-1 Okubo, Shinjuku-kuJapan

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