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Direct Writing Techniques: Electron Beam and Focused Ion Beam

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Electrochemistry at the Nanoscale

Part of the book series: Nanostructure Science and Technology ((NST))

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Abstract

Due to significant theoretical and technological new advances, nanostructuring of surfaces has attracted a great deal of scientific interest. The continuous demand for shrinking the dimensions of structures to reach the nanometer scale is mainly motivated by the discovery of new behaviors dominated by unique properties that are encountered when nanosize dimensions are approached (e.g., quantum confinement). Additionally, a major thrust for shrinking dimensions originates from the microelectronic field requiring the development of smaller devices, system integration, and system diversification. Thus, electronic materials as well as integrated materials adding new features must be structured at the micro- and nanometer scale.

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Authors and Affiliations

  1. Laboratoire MADIREL (UMR 6121), Université de Provence-CNRS, Centre Saint Jérôme, F-13397, Marseille Cedex 20, France

    T. Djenizian

  2. Lehrstuhl für Elektronische Bauelemente, Universität Erlangen-Nürnberg, Cauerstr. 6, 91058, Erlangen, Germany

    C. Lehrer

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  1. T. Djenizian
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  2. C. Lehrer
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Correspondence to T. Djenizian .

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Editors and Affiliations

  1. Abt. Materialwissenschaften, WWIV - LKO, Universität Erlangen-Nürnberg, Martensstr. 7, Erlangen, 91058, Germany

    Patrik Schmuki

  2. Abt. Materialwissenschaften, WWIV - LKO, Universität Erlangen-Nürnberg, Martensstr. 7, Erlangen, 91058, Germany

    Sannakaisa Virtanen

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Djenizian, T., Lehrer, C. (2009). Direct Writing Techniques: Electron Beam and Focused Ion Beam. In: Schmuki, P., Virtanen, S. (eds) Electrochemistry at the Nanoscale. Nanostructure Science and Technology. Springer, New York, NY. https://doi.org/10.1007/978-0-387-73582-5_4

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